Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls

doi:10.11933/j.issn.1007-9289.20180213001

CORC > 兰州理工大学 > 兰州理工大学 > 学报编辑部

	Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls
	Fu Yu 1,2; Lu Yang 2; Yang Xiao-tian 2; Wang Yong-fu 1; Zhang Jun-yan 1
刊名	CHINA SURFACE ENGINEERING
	2018-08-01
卷号	31 期号:4 页码:113-121
关键词	super-low friction hydrogenated carbon film graphite-like fullerene-like
ISSN号	1007-9289
DOI	10.11933/j.issn.1007-9289.20180213001
英文摘要	Currently, hydrogenated carbon films containing the fullerene-like structures (FL-C:H) are mainly prepared on single-crystal Si substrates by plasma enhanced chemical vapor deposition (PECVD). In-situ plasma nitriding was additionally introduced prior to the PECVD process, to enhance the adhesion between the carbon films and steel substrates. The samples were prepared with different deposition times (30, 60, 90, 120, 150 and 180 min). Thickness, nanostructural evolution and tribological behavior of the coating were investigated. The results show that the FL-C: H film PECVD deposition process causes the temperature of the steel substrate to decrease as the deposition time increases (using a lower substrate bias than the extra in-situ nitriding process introduced), resulting in the structure transformation of the film. The films precent a graphite-like structure at the starting stage and gradually transform into a fullerene-like structure. The films deposited for 180 min exhibit super-low friction (0.009) and superlong wear life (53 000 cycles).
WOS研究方向	Materials Science
语种	中文
出版者	CHINESE ASSOC SCIENCE & TECHNOLOGY-CAST
WOS记录号	WOS:000440623100011
内容类型	期刊论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/155667]
专题	学报编辑部
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Gansu, Peoples R China 2.Lanzhou Univ Technol, Coll Mat & Engn, Lanzhou 730050, Gansu, Peoples R China;
推荐引用方式 GB/T 7714	Fu Yu,Lu Yang,Yang Xiao-tian,et al. Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls[J]. CHINA SURFACE ENGINEERING,2018,31(4):113-121.
APA	Fu Yu,Lu Yang,Yang Xiao-tian,Wang Yong-fu,&Zhang Jun-yan.(2018).Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls.CHINA SURFACE ENGINEERING,31(4),113-121.
MLA	Fu Yu,et al."Effects of Deposition Temperature on Structure and Tribological Properties of Hydrogenated Carbon Films on Steel Balls".CHINA SURFACE ENGINEERING 31.4(2018):113-121.