Effect of substrate bias voltage on the mechanical and tribological properties of low concentration Ti-containing diamond like carbon films

doi:10.4028/www.scientific.net/AMM.182-183.232

	Effect of substrate bias voltage on the mechanical and tribological properties of low concentration Ti-containing diamond like carbon films
	Cui, Jinfeng 1; Qiang, Li 1,2; Zhang, Bin 2; Ling, Xiao 1,2; Zhang, Junyan 2
	2012
会议日期	September 7, 2012 - September 9, 2012
会议地点	Shenyang, Liaoning, China
关键词	Argon Bias voltage Carbon films Diamond like carbon films Mechanical properties Methane Semiconductor doping Titanium Titanium carbide Tribology Argon mixture Atomic concentration DLC film Hardness values Hydrogenated diamond Low concentrations Low friction coefficients Mechanical and tribological properties Metallic titanium Room temperature Si substrates Substrate bias voltages Ti doping Tribological properties Wear rates XPS analysis
卷号	182-183
DOI	10.4028/www.scientific.net/AMM.182-183.232
页码	232-236
英文摘要	Ti containing hydrogenated diamond like carbon films (Ti-DLC) was deposited on Si substrates at room temperature by magnetron sputtering Ti-twin target in methane and argon mixture atmosphere via changing the substrate bias voltage. The Ti atomic concentration in the film is less than 0.57% and exists mainly in the form of metallic titanium rather than TiC, confirmed by XPS analysis. The internal compressive stress of the film decreases monotonically with the substrate bias voltage increase. However, the hardness values of the film keep at level (12 GPa) without almost any obvious change with the increase of the substrate bias voltage. Furthermore, Ti-containing DLC film prepared at -1600 V substrate bias voltage shows an extremely low wear rate (~10-9 mm3/Nm) and low friction coefficient (0.09). © (2012) Trans Tech Publications, Switzerland.
会议录	Applied Mechanics and Materials
会议录出版者	Trans Tech Publications, P.O. Box 1254, Clausthal-Zellerfeld, D-38670, Germany
语种	英语
ISSN号	16609336
内容类型	会议论文
源URL	[http://ir.lut.edu.cn/handle/2XXMBERH/116410]
专题	实验室建设与管理处石油化工学院
作者单位	1.School of Petroleum Chemical Engineering, Lanzhou University of Technology, Lanzhou 730050, China; 2.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
推荐引用方式 GB/T 7714	Cui, Jinfeng,Qiang, Li,Zhang, Bin,et al. Effect of substrate bias voltage on the mechanical and tribological properties of low concentration Ti-containing diamond like carbon films[C]. 见:. Shenyang, Liaoning, China. September 7, 2012 - September 9, 2012.