Large-area transfer of two-dimensional materials free of cracks, contamination and wrinkles via controllable conformal contact

doi:10.1038/s41467-022-31887-z

CORC > 力学研究所 > 中国科学院力学研究所 > 非线性力学国家重点实验室

	Large-area transfer of two-dimensional materials free of cracks, contamination and wrinkles via controllable conformal contact
	Zhao, Yixuan 11; Song, Yuqing 10,11; Hu, Zhaoning 10; Wang, Wendong 9; Chang, Zhenghua 7,8; Zhang, Yan 10; Lu, Qi 6,10; Wu, Haotian 10; Liao, Junhao 4,5; Zou, Wentao 10
刊名	NATURE COMMUNICATIONS
	2022-07-29
卷号	13 期号:1 页码:10
DOI	10.1038/s41467-022-31887-z
通讯作者	Wei, Yujie(yujie_wei@lnm.imech.ac.cn) ; Peng, Hailin(hlpeng@pku.edu.cn) ; Lin, Li(linli-cnc@pku.edu.cn) ; Liu, Zhongfan(zfliu@pku.edu.cn)
英文摘要	Reliable transfer techniques are critical for the integration of 2D materials with arbitrary substrates. Here, the authors describe a method to transfer 4-inch and A4-sized defect-free graphene films onto rigid and flexible substrates with controllable conformal contact, leading to improved electrical properties and uniformity. The availability of graphene and other two-dimensional (2D) materials on a wide range of substrates forms the basis for large-area applications, such as graphene integration with silicon-based technologies, which requires graphene on silicon with outperforming carrier mobilities. However, 2D materials were only produced on limited archetypal substrates by chemical vapor deposition approaches. Reliable after-growth transfer techniques, that do not produce cracks, contamination, and wrinkles, are critical for layering 2D materials onto arbitrary substrates. Here we show that, by incorporating oxhydryl groups-containing volatile molecules, the supporting films can be deformed under heat to achieve a controllable conformal contact, enabling the large-area transfer of 2D films without cracks, contamination, and wrinkles. The resulting conformity with enhanced adhesion facilitates the direct delamination of supporting films from graphene, providing ultraclean surfaces and carrier mobilities up to 1,420,000 cm(2) V-1 s(-1) at 4 K.
资助项目	National Laboratory for Molecular Sciences[BNLMS-CXTD-202001] ; Beijing Municipal Science & Technology Commission[Z181100004818001] ; Beijing Municipal Science & Technology Commission[Z191100000819005] ; Beijing Municipal Science & Technology Commission[Z191100000819007] ; Beijing Municipal Science & Technology Commission[Z201100008720005] ; National Basic Research Program of China[2016YFA0200101] ; National Basic Research Program of China[2016YFA0200103] ; National Basic Research Program of China[2019YFA0708203] ; Beijing Nova Program of Science and Technology[Z191100001119067] ; National Natural Science Foundation Youth Fund[22105006] ; National Natural Science Foundation of China[21525310] ; National Natural Science Foundation of China[61974139] ; National Natural Science Foundation of China[51432002] ; National Natural Science Foundation of China[T2188101] ; National Natural Science Foundation of China[51520105003]
WOS关键词	DER-WAALS EPITAXY ; HIGH-QUALITY ; GRAPHENE TRANSFER ; SINGLE-CRYSTAL ; TRANSPORT ; STRENGTH ; GROWTH
WOS研究方向	Science & Technology - Other Topics
语种	英语
WOS记录号	WOS:000840832000025
资助机构	National Laboratory for Molecular Sciences ; Beijing Municipal Science & Technology Commission ; National Basic Research Program of China ; Beijing Nova Program of Science and Technology ; National Natural Science Foundation Youth Fund ; National Natural Science Foundation of China
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/89931]
专题	力学研究所_非线性力学国家重点实验室
通讯作者	Wei, Yujie; Peng, Hailin; Lin, Li; Liu, Zhongfan
作者单位	1.Peking Univ, Sch Mat Sci & Engn, Beijing 100871, Peoples R China 2.Chinese Acad Sci, Beijing Natl Lab Mol Sci, Natl Ctr Mass Spectrometry Beijing, CAS Key Lab Analyt Chem Living Biosyst,Inst Chem, Beijing 100190, Peoples R China 3.Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Coll Elect Sci & Technol,Fac Informat Technol, Beijing 100190, Peoples R China 4.Chinese Acad Sci, CAS Key Lab Nanosyst & Hierarch Fabricat, CAS Ctr Excellence Nanosci, Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China 5.Peking Univ, Acad Adv Interdisciplinary Studies, Beijing 100871, Peoples R China 6.China Univ Petr, State Key Lab Heavy Oil Proc, Coll Sci, Beijing 102249, Peoples R China 7.Univ Chinese Acad Sci, Sch Engn Sci, Beijing 100049, Peoples R China 8.Chinese Acad Sci, LNM, Inst Mech, Beijing, Peoples R China 9.Univ Manchester, Dept Phys & Astron, Manchester M13 9PL, Lancs, England 10.Beijing Graphene Inst, Beijing 100095, Peoples R China
推荐引用方式 GB/T 7714	Zhao, Yixuan,Song, Yuqing,Hu, Zhaoning,et al. Large-area transfer of two-dimensional materials free of cracks, contamination and wrinkles via controllable conformal contact[J]. NATURE COMMUNICATIONS,2022,13(1):10.
APA	Zhao, Yixuan.,Song, Yuqing.,Hu, Zhaoning.,Wang, Wendong.,Chang, Zhenghua.,...&Liu, Zhongfan.(2022).Large-area transfer of two-dimensional materials free of cracks, contamination and wrinkles via controllable conformal contact.NATURE COMMUNICATIONS,13(1),10.
MLA	Zhao, Yixuan,et al."Large-area transfer of two-dimensional materials free of cracks, contamination and wrinkles via controllable conformal contact".NATURE COMMUNICATIONS 13.1(2022):10.