A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors

doi:10.1016/j.jeurceramsoc.2022.04.045

CORC > 金属研究所 > 中国科学院金属研究所

	A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors
	Liu, Housheng 2,3; Tariq, Naeem ul Haq 1; Jing, Weichen 2,3; Cui, Xinyu 3; Tang, Mingqiang 3; Xiong, Tianying 3
刊名	JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
	2022-09-01
卷号	42 期号:11 页码:4456-4464
关键词	HMDSO MOCVD SiC Thermal reduction
ISSN号	0955-2219
DOI	10.1016/j.jeurceramsoc.2022.04.045
通讯作者	Tang, Mingqiang(mqtang@imr.ac.cn) ; Xiong, Tianying(tyxiong@imr.ac.cn)
英文摘要	A series of 3 C-SiC coatings were prepared by organometallic chemical vapor deposition (MOCVD) using precursor solution containing a varying proportion of commercial-grade hexamethyldisiloxane (HMDSO) and nhexane. The phase composition, bonding state, and microstructure of 3 C-SiC coatings were studied in detail by grazing incidence X-ray diffraction (GIXRD), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM). The microstructure and mechanical properties of the optimal 3 C-SiC coating were characterized by scanning transmission electron microscopy (STEM) and nanoindentation, respectively. Our results revealed that the amount of undesired graphite phase can be significantly reduced in the 3 C-SiC coating by introducing hydrogen gas in the reaction chamber alongside increasing the ratio of HMDSO/nhexane in the precursor mixture. The STEM results revealed that the optimal coating was predominantly composed of nano-crystalline 3 C-SiC grains alongside a small amount of amorphous graphite. The hardness and elastic modulus of the optimal coating were 38.19 GPa and 363.2 GPa, respectively.
资助项目	National Key Research and Devel-opment Project[2019YFB2005302]
WOS研究方向	Materials Science
语种	英语
出版者	ELSEVIER SCI LTD
WOS记录号	WOS:000808130400004
资助机构	National Key Research and Devel-opment Project
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/174422]
专题	金属研究所_中国科学院金属研究所
通讯作者	Tang, Mingqiang; Xiong, Tianying
作者单位	1.Pakistan Inst Engn & Appl Sci, Dept Met & Mat Engn, Islamabad, Pakistan 2.Univ Sci & Technol China, Sch Mat Sci & Engn, Shenyang 110016, Peoples R China 3.Chinese Acad Sci, Inst Met Res, Shi Changxu Innovat Ctr Adv Mat, Shenyang 110016, Peoples R China
推荐引用方式 GB/T 7714	Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,et al. A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors[J]. JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,2022,42(11):4456-4464.
APA	Liu, Housheng,Tariq, Naeem ul Haq,Jing, Weichen,Cui, Xinyu,Tang, Mingqiang,&Xiong, Tianying.(2022).A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors.JOURNAL OF THE EUROPEAN CERAMIC SOCIETY,42(11),4456-4464.
MLA	Liu, Housheng,et al."A viable approach to prepare 3C-SiC coatings by thermal MOCVD using commercial grade precursors".JOURNAL OF THE EUROPEAN CERAMIC SOCIETY 42.11(2022):4456-4464.