High-efficiency-and-quality nanostructuring of molybdenum surfaces by orthogonally polarized blue femtosecond lasers

doi:10.1016/j.apsusc.2021.151371

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	High-efficiency-and-quality nanostructuring of molybdenum surfaces by orthogonally polarized blue femtosecond lasers
	B. Zhao; X. Zheng; Y. H. Lei; H. B. Xie; T. T. Zou; G. Yuan; W. Xin and J. J. Yang
刊名	Applied Surface Science
	2022
卷号	572 页码:10
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2021.151371
英文摘要	Femtosecond laser-induced periodic surface structures featured by a mask-free and one-step procedure provide a new fascinating prospect for the high precision manufacture applicable to diverse materials, but still face challenges in both the fabrication efficiency and the structure quality. Here, a homogenous large-area nanolithography is implemented on molybdenum surface, through using cylindrical focusing of double temporally delayed blue femtosecond lasers with orthogonal polarizations. The achieved grating structures present some unique features including the ablated narrow groove width of 100 nm, the small period of 245 nm, the smooth ridge profiles, and especially the uniform distribution in a mm-scaled range without bending, spitting and interruption. The calculated structure orientation angle shows an unprecedentedly minimum dispersion value of 5 degrees, indicting a significant improvement on the structure uniformity compared with the observations of the singlebeam femtosecond laser irradiation. The simulation results reveal that the transient spatiotemporal correlations between the localized electromagnetic field distributions from the double orthogonally polarized laser pulses constitutes a positive feedback mechanism to regularize the growth of the surface structures. A macro-sized surface pattern of such uniform structures displays good monochromatic colors and excellent broadband antireflection performances. This efficient laser nanolithography facilitates the applications in the fields of nanooptics.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65288]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	B. Zhao,X. Zheng,Y. H. Lei,et al. High-efficiency-and-quality nanostructuring of molybdenum surfaces by orthogonally polarized blue femtosecond lasers[J]. Applied Surface Science,2022,572:10.
APA	B. Zhao.,X. Zheng.,Y. H. Lei.,H. B. Xie.,T. T. Zou.,...&W. Xin and J. J. Yang.(2022).High-efficiency-and-quality nanostructuring of molybdenum surfaces by orthogonally polarized blue femtosecond lasers.Applied Surface Science,572,10.
MLA	B. Zhao,et al."High-efficiency-and-quality nanostructuring of molybdenum surfaces by orthogonally polarized blue femtosecond lasers".Applied Surface Science 572(2022):10.