Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform

doi:10.37188/OPE.20212909.2149

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	Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform
	X. Zhang; L.-J. Lai; P.-Z. Li and L.-M. Zhu
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2021
卷号	29 期号:9 页码:2149-2157
ISSN号	1004924X
DOI	10.37188/OPE.20212909.2149
英文摘要	To overcome the problems of low damping resonance and different dynamics properties in the large-range compliant micro-positioning stage driven by a voice coil motor, a compound closed-loop frequency-domain inverse iterative learning control method based on data-driven frequency-domain inverse iterative feedforward compensation and PI feedback control with phase-lead compensation is used for high-speed and high-precision control. First, the micro-positioning stage with a double-parallelogram flexure mechanism driven by a voice coil motor is built, and a dynamics model is identified for different working positions. Then, a PI feedback controller with phase-lead compensation is designed to improve the relative stability of the positioning system. Input and output data are then used for online inverse estimation of the system frequency response function, which can be used as feedforward compensation to further eliminate the resonance effect. Finally, tracking experiments are conducted using the proposed control method, which is then compared with other methods. Experimental results show that the maximum tracking error for the triangular trajectory using the proposed control method is 0.175%. Compared with a PID control, phase-leading PI control, and transfer function inverse feedforward control, the root mean square errors of tracking are reduced by 8.75, 5.43, and 2.21 times, respectively, which can better meet the requirements of high tracking accuracy, fast speed, and strong anti-interference ability of large stroke micro/nano-positioning. 2021, Science Press. All right reserved.
URL标识	查看原文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65095]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Zhang,L.-J. Lai,P.-Z. Li and L.-M. Zhu. Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2021,29(9):2149-2157.
APA	X. Zhang,L.-J. Lai,&P.-Z. Li and L.-M. Zhu.(2021).Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,29(9),2149-2157.
MLA	X. Zhang,et al."Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 29.9(2021):2149-2157.