Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods

doi:10.3390/coatings11050492

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods
	X. Guo; X. Q. Quan; Z. Z. Li; Q. Li; B. Z. Zhang; X. Zhang and C. Song
刊名	Coatings
	2021
卷号	11 期号:5 页码:10
DOI	10.3390/coatings11050492
英文摘要	Broadband anti-reflection (AR) coatings are essential elements for improving the photocurrent generation of photovoltaic modules and enhancing visibility in optical devices. In this paper, we report a hybrid-structured, anti-reflection coating that combines multi-layer thin films with a single top-oblique deposited layer. By simply introducing this low-refractive index layer, the broadband anti-reflection properties of optical thin films can be improved while simplifying the preparation. Precise time-controlled and oblique-angle deposition (OAD) methods were used to fabricate the broadband AR coating. By accurately measuring and adjusting the design errors for the thin and thick film layers, 22-layer and 36-layer AR coatings on a sapphire substrate with a 400-2000 nm wideband were obtained. This bottom-up preparation process and AR coating design have the potential to significantly enhance the broadband antireflective properties for many optical systems and reduce the manufacturing cost of broadband AR coatings.
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内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/65079]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Guo,X. Q. Quan,Z. Z. Li,et al. Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods[J]. Coatings,2021,11(5):10.
APA	X. Guo,X. Q. Quan,Z. Z. Li,Q. Li,B. Z. Zhang,&X. Zhang and C. Song.(2021).Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods.Coatings,11(5),10.
MLA	X. Guo,et al."Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods".Coatings 11.5(2021):10.