A strain-free semi-kinematic mount for ultra-precision optical systems

doi:10.1016/j.optlaseng.2020.106287

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	A strain-free semi-kinematic mount for ultra-precision optical systems
	D. F. Zhang,P. Z. Li,W. Xu,Z. X. Li,G. Jin and J. G. Zhang
刊名	Optics and Lasers in Engineering
	2020
卷号	134 页码:11
ISSN号	0143-8166
DOI	10.1016/j.optlaseng.2020.106287
英文摘要	A high-precision and strain-free semi-kinematic mount has been proposed in this research for ultra-precision optical systems. The mount includes three identical feet. Each foot constrains the axial and the tangential direction of the lens motion. Three feet in combination precisely control the six degree-of-freedom (6-DOF) motion of the lens. A strain-free mount of the lens was obtained and the high-precision surface figure of the lens was guaranteed. A prototype of the semi-kinematic mount was developed for the lens with diameter/thickness ratio of 6.73. The surface figure testing of the static mount, the 6-DOF dynamic adjustment and the thermal mount of the lens were carried out. The experimental results show that the surface figure of the static mount is 1.963 nm before adhesion on the feet. With the influence of the shrinkage stress of the epoxy glue, the surface figure of the lens is degenerated to 2.133 nm after adhesion on the feet. When the lens is adjusted 30 mu m translation in x/y/z-axis direction or 200 mu rad rotation around the x/y/z-axis, respectively, the maximum error of the surface figure is 0.2 nm, which implies the excellent matching character between the developed mount and the 6-DOF adjustment mechanism. Furthermore, with the action of 312 mW thermal load, the surface figure degradation of the lens is less than 0.3 nm in reaching steady state, which indicates the strain-free character of the mount. The experimental results verified the effectiveness of the proposed semi-kinematic mount, as well as its promising applications in ultra-precision optical systems.
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语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64907]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	D. F. Zhang,P. Z. Li,W. Xu,Z. X. Li,G. Jin and J. G. Zhang. A strain-free semi-kinematic mount for ultra-precision optical systems[J]. Optics and Lasers in Engineering,2020,134:11.
APA	D. F. Zhang,P. Z. Li,W. Xu,Z. X. Li,G. Jin and J. G. Zhang.(2020).A strain-free semi-kinematic mount for ultra-precision optical systems.Optics and Lasers in Engineering,134,11.
MLA	D. F. Zhang,P. Z. Li,W. Xu,Z. X. Li,G. Jin and J. G. Zhang."A strain-free semi-kinematic mount for ultra-precision optical systems".Optics and Lasers in Engineering 134(2020):11.