Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere

doi:10.1016/j.jallcom.2020.155585

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere
	C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen
刊名	Journal of Alloys and Compounds
	2020
卷号	840 页码:7
ISSN号	0925-8388
DOI	10.1016/j.jallcom.2020.155585
英文摘要	We have demonstrated the fast-speed and high-rejection-ratio solar-blind ultraviolet (UV) photodetectors based on amorphous Ga2O3 (a-Ga2O3) films grown by atomic layer deposition. The effect of the annealing under oxygen atmosphere on the performance of a-Ga2O3 photodetectors is investigated. By the oxygen annealing at 500 C, the 90-10% decay time of a-Ga2O3 photodetector can be decreased to ~150 ns, and the UV/Visible rejection ratio of the photodetector can reach as high as 2.74 105, due to the significant suppression of the visible light response. Moreover, the dark current of the 500 C-annealed photodetector is only 9.43 pA at 10 V bias. These phenomena can be explained by the decrease in oxygen vacancy concentration of the a-Ga2O3 films after the oxygen annealing. The combination of high rejection ratios and fast operating speeds offers a viable way for facile and scalable fabrication of the oxide semiconductor solar-blind UV detectors.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64783]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen. Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere[J]. Journal of Alloys and Compounds,2020,840:7.
APA	C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen.(2020).Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere.Journal of Alloys and Compounds,840,7.
MLA	C. Q. Zhou,K. W. Liu,X. Chen,J. H. Feng,J. L. Yang,Z. Z. Zhang,L. Liu,Y. Xia and D. Z. Shen."Performance improvement of amorphous Ga 2 O 3 ultraviolet photodetector by annealing under oxygen atmosphere".Journal of Alloys and Compounds 840(2020):7.