Epitaxial growth of polarization-graded AlGaN-based solar-blind ultraviolet photodetectors on pre-grown AlN templates

doi:10.1016/j.matlet.2020.128638

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	Epitaxial growth of polarization-graded AlGaN-based solar-blind ultraviolet photodetectors on pre-grown AlN templates
	Y. R. Chen,Z. W. Zhang,G. Q. Miao,H. Jiang,Z. M. Li and H. Song
刊名	Materials Letters
	2020
卷号	281 页码:4
ISSN号	0167-577X
DOI	10.1016/j.matlet.2020.128638
英文摘要	In this letter, based on the method of introducing one mesothermal AlN (MT-AlN) interlayer, a high-quality AlN template is firstly obtained by adjusting the growth rate of the high-temperature AlN (HTAlN) epilayers on both sides of the MT-AlN interlayer. Then, the epitaxial growth of polarization-graded AlGaN-based solar-blind ultraviolet photodetector (SUV-PD) structural material is implemented on the pre-grown AlN template by introducing an n-AlxGa1-xN gradient layer. It leads to the elimination of band discontinuity and forms a polarization-graded induced field resulting in a high-performance back-illuminated AlGaN-based SUV-PD. This research provides an important reference for the development of high-performance back-illuminated AlGaN-based SUV-PDs. (C) 2020 Elsevier B.V. All rights reserved.
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语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64498]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. R. Chen,Z. W. Zhang,G. Q. Miao,H. Jiang,Z. M. Li and H. Song. Epitaxial growth of polarization-graded AlGaN-based solar-blind ultraviolet photodetectors on pre-grown AlN templates[J]. Materials Letters,2020,281:4.
APA	Y. R. Chen,Z. W. Zhang,G. Q. Miao,H. Jiang,Z. M. Li and H. Song.(2020).Epitaxial growth of polarization-graded AlGaN-based solar-blind ultraviolet photodetectors on pre-grown AlN templates.Materials Letters,281,4.
MLA	Y. R. Chen,Z. W. Zhang,G. Q. Miao,H. Jiang,Z. M. Li and H. Song."Epitaxial growth of polarization-graded AlGaN-based solar-blind ultraviolet photodetectors on pre-grown AlN templates".Materials Letters 281(2020):4.