Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning

doi:10.1109/access.2020.3028379

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	Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning
	M. S. Cao,Y. M. Bo and H. B. Gao
刊名	Ieee Access
	2020
卷号	8 页码:181224-181232
ISSN号	2169-3536
DOI	10.1109/access.2020.3028379
英文摘要	This article presents a data-driven algorithm that combines the advantages of iterative feedforward tuning and disturbance rejection control to satisfy the precision requirements and ensure extrapolation capability of wafer scanning. The proposed algorithm differs from pre-existing algorithms in terms of its low requirement of system model, high extrapolation capability for non repetitive trajectory tracking tasks, and high tracking precision. The feedforward controller is tuned based on instrumental variables. It utilizes tracking errors from past iterations to eliminate reference-induced errors without requiring a system model. Meanwhile, the system inverse is approximated during iterative process, and then a disturbance rejection control based on iterative tuning is constructed to compensate for disturbance-induced errors. The proposed algorithm is applied to a wafer stage. The experimental results validate the effectiveness and superiority of the proposed algorithm.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/64367]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. S. Cao,Y. M. Bo and H. B. Gao. Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning[J]. Ieee Access,2020,8:181224-181232.
APA	M. S. Cao,Y. M. Bo and H. B. Gao.(2020).Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning.Ieee Access,8,181224-181232.
MLA	M. S. Cao,Y. M. Bo and H. B. Gao."Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning".Ieee Access 8(2020):181224-181232.