Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time

doi:10.1016/j.optcom.2018.03.024

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	Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time
	Yang, C.; Li, Y. H.; Xue, C. X.; Li, X. T.; Yu, H. L.
刊名	Optics Communications
	2018
卷号	420 页码:122-126
关键词	Diffraction grating Phase measurement System design Grating wavefront interferometric control diffraction resolution carriage Optics
ISSN号	0030-4018
DOI	10.1016/j.optcom.2018.03.024
英文摘要	To improve the grating wavefront quality especially the grating size, which is more than 1 m, we provide a method based on conical diffraction theory and grating groove active control technology to correct the grating substrate surface error. We apply the grating groove active control technology to carry out an echelle grating ruling experiment whose line density is 79 lines/mm in 36th order. Compared with the grating substrate surface error, the grating wavefront value reduces from 0.105 lambda to 0.056 lambda i.e., decreases by 47%. The experimental result proves that the grating substrate surface error compensation method can be used to improve the grating wavefront quality effectively.
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/61123]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Yang, C.,Li, Y. H.,Xue, C. X.,et al. Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time[J]. Optics Communications,2018,420:122-126.
APA	Yang, C.,Li, Y. H.,Xue, C. X.,Li, X. T.,&Yu, H. L..(2018).Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time.Optics Communications,420,122-126.
MLA	Yang, C.,et al."Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time".Optics Communications 420(2018):122-126.