Rapid fabrication of a lightweight 2m reaction-bonded SiC aspherical mirror

doi:10.1016/j.rinp.2018.08.013

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Rapid fabrication of a lightweight 2m reaction-bonded SiC aspherical mirror
	Li, L. X.; Liu, Z. Y.; Xue, D. L.; Deng, W. J.; Li, R. G.; Bai, Y.; Zeng, X. F.; Zhang, X. J.
刊名	Results in Physics
	2018
卷号	10 页码:903-912
关键词	Computer controlled polishing Silicon carbide mirror Surface error Magnetorheological finishing Large polishing lap dwell time algorithm material removal tool path Materials Science Physics
ISSN号	2211-3797
DOI	10.1016/j.rinp.2018.08.013
英文摘要	Magnetorheological finishing (MRF) fabrication can effectively facilitate a rapid fabrication of an aspherical 2m reaction-bonded silicon carbide mirror. The dwell-time algorithm and tool path supported tool-mark mitigation and virtual-axis employment are analyzed. A rapid-fabrication strategy alternates MRF and a large polishing lap to converge surface error profile before MRF alone is used to high-precise finishing. In the alternate-use process, large polishing lap's dwell time map for low-order space frequency is calculated before MRF's for high-order one, but executed later in reality. The fabricated mirror with a silicon modification layer showed accuracy convergence from 0.098 lambda rms to 0.019 lambda rms at 84.6 h, demonstrating the strategy's validity for large optical-surface processing.
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/60782]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Li, L. X.,Liu, Z. Y.,Xue, D. L.,et al. Rapid fabrication of a lightweight 2m reaction-bonded SiC aspherical mirror[J]. Results in Physics,2018,10:903-912.
APA	Li, L. X..,Liu, Z. Y..,Xue, D. L..,Deng, W. J..,Li, R. G..,...&Zhang, X. J..(2018).Rapid fabrication of a lightweight 2m reaction-bonded SiC aspherical mirror.Results in Physics,10,903-912.
MLA	Li, L. X.,et al."Rapid fabrication of a lightweight 2m reaction-bonded SiC aspherical mirror".Results in Physics 10(2018):903-912.