Deposition of DLC films on the inner wall of U-type pipes by hollow cathode PECVD

	Deposition of DLC films on the inner wall of U-type pipes by hollow cathode PECVD
	Xubing Wei 1,3; Pingmei Yin 1,3; Jian Wu 1; Xiangfan Nie 2; Zhibin Lu 1; Guangan Zhang 1,3
刊名	Diamond & Related Materials
	2021-02-06
期号	114 页码:108308
关键词	Hollow cathode PECVD DLC films Pipes inner wall U-type pipes Corrosion Tribology
DOI	10.1016/j.diamond.2021.108308
WOS记录号	WOS:000688437800006
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/27911]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Zhibin Lu; Guangan Zhang
作者单位	1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences 2.Science and Technology on Plasma Dynamics Laboratory, Air Force Engineering University 3.Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences
推荐引用方式 GB/T 7714	Xubing Wei,Pingmei Yin,Jian Wu,et al. Deposition of DLC films on the inner wall of U-type pipes by hollow cathode PECVD[J]. Diamond & Related Materials,2021(114):108308.
APA	Xubing Wei,Pingmei Yin,Jian Wu,Xiangfan Nie,Zhibin Lu,&Guangan Zhang.(2021).Deposition of DLC films on the inner wall of U-type pipes by hollow cathode PECVD.Diamond & Related Materials(114),108308.
MLA	Xubing Wei,et al."Deposition of DLC films on the inner wall of U-type pipes by hollow cathode PECVD".Diamond & Related Materials .114(2021):108308.