In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays | |
Zhong Y(仲亚)1,3,4; Yu HB(于海波)1,4; Zhou PL(周培林)2; Wen YD(文扬东)1,3,4; Zhao WX(赵文秀)1,3,4; Zou WH(邹旿昊)1,3,4; Luo H(罗昊)1,3,4; Wang YC(王越超)1,4; Liu LQ(刘连庆)1,4 | |
刊名 | ACS Applied Materials and Interfaces |
2021 | |
卷号 | 13期号:33页码:39550−39560 |
关键词 | E-jet printing tunable microlens array electrowetting on dielectric in situ fabrication electrode structure |
ISSN号 | 1944-8244 |
产权排序 | 1 |
英文摘要 | Tunable microlens arrays (MLAs) with controllable focal lengths have been extensively used in optical sensors, biochips, and electronic devices. The commonly used method is electrowetting on dielectric (EWOD) that controls the contact angle of the microlens to adjust the focal length. However, the fabrication of tunable MLAs at the microscale remains a challenge because the size of MLAs is limited by the external electrodes of EWOD. In this study, a highly integrated planar annular microelectrode array was proposed to achieve an electrowetting tunable MLA. The planar microelectrode was fabricated by electrohydrodynamic jet (E-jet) printing and the liquid microlens was then deposited in situ on the microelectrode. This method could realize 36 tunable liquid microlenses with an average diameter of 24 μm in a 320 × 320 μm2 plane. The fabricated tunable MLAs with higher integration levels and smaller sizes can be beneficial for cell imaging, optofluidic systems, and microfluidic chips. |
资助项目 | National Natural Science Foundation of China[61925307] ; National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[61973298] ; National Natural Science Foundation of China[61803366] ; National Natural Science Foundation of China[61821005] ; External Cooperation Program of the Chinese Academy of Sciences[173321KYSB20170015] ; CAS Interdisciplinary Innovation Team[JCTD-2019-09] ; Liaoning Revitalization Talents Program[XLYC1807006] ; Youth Innovation Promotion Association of the Chinese Academy of Sciences[Y201943] |
WOS关键词 | ARTIFICIAL COMPOUND EYES ; LIQUID MICROLENS ; LENS ARRAYS ; SOLAR-CELL ; INTEGRATION |
WOS研究方向 | Science & Technology - Other Topics ; Materials Science |
语种 | 英语 |
WOS记录号 | WOS:000691785200059 |
资助机构 | National Natural Science Foundation of China (Grant Nos. 61925307, 61727811, 61973298, 61803366, and 61821005) ; External Cooperation Program of the Chinese Academy of Sciences (Grant No. 173321KYSB20170015) ; CAS Interdisciplinary Innovation Team (JCTD-2019-09) ; Liaoning Revitalization Talents Program (Grant No. XLYC1807006) ; Youth Innovation Promotion Association of the Chinese Academy of Sciences (Grant No. Y201943) |
内容类型 | 期刊论文 |
源URL | [http://ir.sia.cn/handle/173321/29577] |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Yu HB(于海波); Liu LQ(刘连庆) |
作者单位 | 1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 2.College of Mechanical and Electrical Engineering, Henan Agricultural University, Zhengzhou 450002, China 3.University of Chinese Academy of Sciences, Beijing 100049, China 4.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, China |
推荐引用方式 GB/T 7714 | Zhong Y,Yu HB,Zhou PL,et al. In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays[J]. ACS Applied Materials and Interfaces,2021,13(33):39550−39560. |
APA | Zhong Y.,Yu HB.,Zhou PL.,Wen YD.,Zhao WX.,...&Liu LQ.(2021).In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays.ACS Applied Materials and Interfaces,13(33),39550−39560. |
MLA | Zhong Y,et al."In Situ Electrohydrodynamic Jet Printing-Based Fabrication of Tunable Microlens Arrays".ACS Applied Materials and Interfaces 13.33(2021):39550−39560. |
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