Feedback control implementation for AFM contact-mode scanner

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Feedback control implementation for AFM contact-mode scanner
	Zhang WL(张纹霖); Miao L(缪磊); Zheng YH(郑云辉); Dong ZL(董再励)
	2008
会议日期	January 6-9, 2008
会议地点	Sanya, China
关键词	Nano Manipulation Afm Hysteresis Preisach Model
页码	590-594
英文摘要	The atomic force microscope (AFM) has become a standard technique to measure the topography properties of sample surfaces with nanometer resolution. And the AFM tip based Nano manipulation system plays an important role in the field of Nano research. However, nearly all the systems are designed in the commercial AFM machine, in which the software and hardware is not open to perform the Nano manipulation related research. This paper describes a feedback control system implementation for AFM contact-mode scanner, as part of work in building a Nano manipulation system. With PSD sensor and piezoceramic driver, we designed an embedded control system to fulfill the scanning experiments. The imaging results of silicon steps using regular PID feedback control scheme show that the scanning performance is limited by the inherent piezoelectric actuator nonlinear characteristics. In order to achieve better scanning image, we add a Preisach model based feedforward loop into the PID feedback controller to compensate for the hysteresis effect of the piezoceramic actuator, and the performance has been improved moderately. This AFM platform will be used as a testbed for future research work and experiments on AFM scan and manipulation.
源文献作者	IEEE, State Key Lab Multi Spectral Informat Proc Technol, Chinese Soc Micro Nano Technol, Ctr Micro & Nano Syst, IEEE Nanotechnol Council, Shenyang Inst Automat, Univ California, UCLA, Ctr Cell Control, Global Engn Technol Inst, Nanosurf AG, Smart Instruments Nanosci & Nanotechnol, US Army Int Technol Ctr, Pacific
产权排序	1
会议录	2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3
会议录出版者	IEEE
会议录出版地	NEW YORK
语种	英语
ISBN号	978-1-4244-1907-4
WOS记录号	WOS:000257066200135
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/8713]
专题	沈阳自动化研究所_机器人学研究室
作者单位	1.Graduate University, Chinese Academy of Sciences 2.State Key Robotics lab., Shenyang Institute of Automation, Chinese Academy of Sciences 3.Department of Electrical and Computer Engineering, Michigan State University, United States
推荐引用方式 GB/T 7714	Zhang WL,Miao L,Zheng YH,et al. Feedback control implementation for AFM contact-mode scanner[C]. 见:. Sanya, China. January 6-9, 2008.