Therapeutic carbon-ion effects on monolithic active pixel sensor with 130 nm high-resistivity process

doi:10.1088/1748-0221/17/01/C01059

	Therapeutic carbon-ion effects on monolithic active pixel sensor with 130 nm high-resistivity process
	Yang, B.1; Duan, J.2,3; Jing, L.4; Wang, Y.3; Fu, F.3; Cao, B.4; Zhao, C.5,6
刊名	JOURNAL OF INSTRUMENTATION
	2022
卷号	17 期号:1 页码:6
关键词	Instrumentation for heavy-ion therapy Particle tracking detectors (Solid-state detectors) Solid state detectors
ISSN号	1748-0221
DOI	10.1088/1748-0221/17/01/C01059
通讯作者	Zhao, C.(chengxin.zhao@impcas.ac.cn)
英文摘要	A Monolithic Active Pixel Sensor (MAPS) is currently being designed in a new 130nm high-resistivity (> 1 k Omega.cm) CMOS process for full image beam monitoring in the carbon-ion therapeutic facility. The charge sensing node collects the charge deposited by the carbon ions that pass through the MAPS. A 3-dimensional TCAD model of the pixel has been established to study the carbon-ion induced process in the MAPS. This paper will discuss the thickness of the depletion layer, the charge collection efficiency, the charge collection time, and the characteristics of NMOS devices with different bias voltages and carbon-ion hitting locations.
资助项目	Strategic Priority Research Program of Chinese Academy of Sciences[XDB34000000] ; National Natural Science Foundation of China[12005278] ; CAS Pioneer Hundred Talent Program ; CAS Light of West China Program
WOS研究方向	Instruments & Instrumentation
语种	英语
出版者	IOP Publishing Ltd
WOS记录号	WOS:000766150700017
资助机构	Strategic Priority Research Program of Chinese Academy of Sciences ; National Natural Science Foundation of China ; CAS Pioneer Hundred Talent Program ; CAS Light of West China Program
内容类型	期刊论文
源URL	[http://119.78.100.186/handle/113462/141921]
专题	中国科学院近代物理研究所
通讯作者	Zhao, C.
作者单位	1.Harbin Univ Sci & Thchnol, Harbin 150080, Peoples R China 2.Shanghai Inst Satellite Engn, Shanghai 201109, Peoples R China 3.Harbin Inst Technol, Harbin 150001, Peoples R China 4.Heilongjiang Univ, Harbin 150006, Peoples R China 5.Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China 6.Univ Chinese Acad Sci, Sch Nucl Sci & Technol, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Yang, B.,Duan, J.,Jing, L.,et al. Therapeutic carbon-ion effects on monolithic active pixel sensor with 130 nm high-resistivity process[J]. JOURNAL OF INSTRUMENTATION,2022,17(1):6.
APA	Yang, B..,Duan, J..,Jing, L..,Wang, Y..,Fu, F..,...&Zhao, C..(2022).Therapeutic carbon-ion effects on monolithic active pixel sensor with 130 nm high-resistivity process.JOURNAL OF INSTRUMENTATION,17(1),6.
MLA	Yang, B.,et al."Therapeutic carbon-ion effects on monolithic active pixel sensor with 130 nm high-resistivity process".JOURNAL OF INSTRUMENTATION 17.1(2022):6.