Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma

doi:10.1109/TPS.2020.3023689

	Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma
	Zhang, Haibao 1; Yuan, Fangli 2; Chen, Qiang 1
刊名	IEEE TRANSACTIONS ON PLASMA SCIENCE
	2020-10-01
卷号	48 期号:10 页码:3621-3628
关键词	Plasma temperature Radio frequency Electron tubes Integrated optics Stimulated emission Hydrogen Diagnostics electron excitation temperature inductively coupled thermal plasma (ICTP) optical emission spectroscopy (OES) thermal efficiency
ISSN号	0093-3813
DOI	10.1109/TPS.2020.3023689
英文摘要	The atmospheric pressure radio frequency (RF) inductively coupled thermal plasma (ICTP) has been extensively used for many industrial processes. In order to understand the physical-chemical mechanism involved in the discharge process of ICTP, in situ optical emission spectroscopy (OES) was carried out to diagnose and determine the active particles and electron excitation temperature in this plasma. Several active particles such as Ar*, H-alpha, and H-beta were detected in the emission spectrum of Ar-H-2 ICTP. Based on the Boltzmann plot method, the electron excitation temperature and thermal efficiency of ICTP were evaluated. It was obtained that the electron excitation temperatures in Ar-H-2 ICTP varied from 9651.70 to 16691.91 K when the applied power was in the range of 8-15 kW, which was significantly higher than the electron excitation temperature in Ar ICTP at the same applied power. Besides, the thermal efficiency was enhanced from 17.19% for the Ar ICTP to 30.69% for the Ar-H-2 ICTP. These results may be beneficial for understanding of the discharge process in atmospheric pressure Ar-H-2 ICTP.
资助项目	National Natural Science Foundation of China (NSFC)[11505013] ; National Natural Science Foundation of China (NSFC)[11875090] ; Natural Science Foundation of Beijing Municipality[1192008] ; Beijing Municipal Excellent Talents Foundation[2016000026833ZK12] ; Project of Beijing Municipal Commission of Education[KM202010015003]
WOS关键词	BORON-NITRIDE NANOTUBES ; WALLED CARBON NANOTUBES ; SCALE PRODUCTION ; HYDROGEN ; ARGON ; AR ; TEMPERATURE ; TECHNOLOGY ; PYROLYSIS ; PROBES
WOS研究方向	Physics
语种	英语
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
WOS记录号	WOS:000577555000042
资助机构	National Natural Science Foundation of China (NSFC) ; Natural Science Foundation of Beijing Municipality ; Beijing Municipal Excellent Talents Foundation ; Project of Beijing Municipal Commission of Education
内容类型	期刊论文
源URL	[http://ir.ipe.ac.cn/handle/122111/42462]
专题	中国科学院过程工程研究所
通讯作者	Chen, Qiang
作者单位	1.Beijing Inst Graph Commun, Lab Plasma Phys & Mat, Beijing 102600, Peoples R China 2.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Haibao,Yuan, Fangli,Chen, Qiang. Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2020,48(10):3621-3628.
APA	Zhang, Haibao,Yuan, Fangli,&Chen, Qiang.(2020).Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma.IEEE TRANSACTIONS ON PLASMA SCIENCE,48(10),3621-3628.
MLA	Zhang, Haibao,et al."Optical Emission Spectroscopy Diagnostics of Atmospheric Pressure Radio Frequency Ar-H-2 Inductively Coupled Thermal Plasma".IEEE TRANSACTIONS ON PLASMA SCIENCE 48.10(2020):3621-3628.