Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

doi:10.3788/COL201917.100201

	Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding
	Zhang, Lu 1; Zhang, Wendong 1; Zhang, Shougang 2; Yan, Shubin 1
刊名	CHINESE OPTICS LETTERS
	2019-10-10
卷号	17 期号:10 页码:5
ISSN号	1671-7694
DOI	10.3788/COL201917.100201
英文摘要	A vapor cell provides a well-controlled and stable inner atmosphere for atomic sensors, such as atomic gyroscopes, atomic magnetometers, and atomic clocks, and its hermeticity affects the stability and aging of atomic sensors. We present the micro-fabrication of a micro-electromechanical system wafer-level hermit vapor cell based on deep reactive ion etching and vacuum anodic-bonding technology. The anodic-bonding process with the voltage increasing in steps of 200 V had a critical influence on vapor cell hermeticity. Further, the silicon-glass bonding surface was experimentally investigated by a scanning electron microscope, which illustrated that there were no visual cracks and defects in the bonding surface. The leak rate was measured using a helium leak detector. The result shows that the vapor cells with different optical cavity lengths comply with the MIL-STD-883E standard (5 x 10(-8) mbar.L/s). Moreover, D2 absorption spectroscopy was characterized via optical absorption. The bonding strength was determined to be 13 MPa, which further verified the quality of the vapor cells.
资助项目	National Key Research and Development Program of China[2017YFB0503200] ; National Natural Science Foundation of China[61675185] ; National Natural Science Foundation of China[61875250] ; Natural Science Foundation of Shanxi Province[201701D121065]
WOS关键词	CLOCKS
WOS研究方向	Optics
语种	英语
出版者	OSA-OPTICAL SOC
WOS记录号	WOS:000490542000014
资助机构	National Key Research and Development Program of China ; National Key Research and Development Program of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Natural Science Foundation of Shanxi Province ; Natural Science Foundation of Shanxi Province ; National Key Research and Development Program of China ; National Key Research and Development Program of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Natural Science Foundation of Shanxi Province ; Natural Science Foundation of Shanxi Province ; National Key Research and Development Program of China ; National Key Research and Development Program of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Natural Science Foundation of Shanxi Province ; Natural Science Foundation of Shanxi Province ; National Key Research and Development Program of China ; National Key Research and Development Program of China ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Natural Science Foundation of Shanxi Province ; Natural Science Foundation of Shanxi Province
内容类型	期刊论文
源URL	[http://210.72.145.45/handle/361003/12011]
专题	中国科学院国家授时中心
通讯作者	Yan, Shubin
作者单位	1.North Univ China, Sci & Technol Elect Test & Measurement Lab, Taiyuan 030051, Shanxi, Peoples R China 2.Chinese Acad Sci, Natl Time Serv Ctr, Key Lab Time & Frequency Primary Stand, Xian 710600, Shaanxi, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Lu,Zhang, Wendong,Zhang, Shougang,et al. Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding[J]. CHINESE OPTICS LETTERS,2019,17(10):5.
APA	Zhang, Lu,Zhang, Wendong,Zhang, Shougang,&Yan, Shubin.(2019).Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding.CHINESE OPTICS LETTERS,17(10),5.
MLA	Zhang, Lu,et al."Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding".CHINESE OPTICS LETTERS 17.10(2019):5.