Two-dimensional simulation of an Ar/H-2 direct-current discharge plasma

doi:10.1063/5.0049041

	Two-dimensional simulation of an Ar/H-2 direct-current discharge plasma
	Che, Yong 1,3; Zang, Qing 3; Han, Xiaofeng 3; Xiao, Shumei 3; Huang, Kai 3; Hu, Jiahui 1,3; Ren, Mengfang 1,3; Liu, Jianwen 1,3; Zhou, Jian 2,3
刊名	AIP ADVANCES
	2021-05-01
卷号	11
DOI	10.1063/5.0049041
通讯作者	Zang, Qing(zangq@ipp.ac.cn.cn)
英文摘要	We created a two-dimensional, mathematical fluid model of a plasma in a spherical direct-current (DC) glow-discharge chamber based on the finite-element method (FEM) using the commercial FEM solver COMSOL Multiphysics. The model is based on the Boltzmann transport equation, and we solved it to simulate the transient physical characteristics of an Ar/H-2 glow-discharge plasma, including the distributions of electron density, electrical potential, electron temperature, and other physical characteristics in the reaction chamber. We simulated a 5%H-2/95%Ar DC glow discharge at 500 V and 2 Torr, and the results show that the electron density is distributed between the anode and the cathode, with a maximum electron density of 2.76 x 10(15) m(-3) and a maximum electron temperature of 5.37 eV. We also studied the effects of the discharge voltage and pressure on the electron density. The mathematical model simulates well the variation of the electron density in the chamber, and it shows that the electron density increases with increasing pressure or driving voltage.
资助项目	National Key Research and Development Program of China[2017YFE0301105] ; National Key Research and Development Program of China[2017YFE0301104] ; National Magnetic Confinement Fusion Science Program of China[2019YFE030015] ; National Natural Science Foundation of China[12075281]
WOS关键词	DIMENSIONAL FLUID MODEL ; METHANE PLASMA
WOS研究方向	Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
出版者	AMER INST PHYSICS
WOS记录号	WOS:000675209300003
资助机构	National Key Research and Development Program of China ; National Magnetic Confinement Fusion Science Program of China ; National Natural Science Foundation of China
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/123263]
专题	中国科学院合肥物质科学研究院
通讯作者	Zang, Qing
作者单位	1.Univ Sci & Technol China, Hefei 230026, Peoples R China 2.Anhui Jianzhu Univ, Hefei 230000, Peoples R China 3.Chinese Acad Sci, Inst Plasma Phys, Hefei Inst Phys Sci, Hefei 230031, Peoples R China
推荐引用方式 GB/T 7714	Che, Yong,Zang, Qing,Han, Xiaofeng,et al. Two-dimensional simulation of an Ar/H-2 direct-current discharge plasma[J]. AIP ADVANCES,2021,11.
APA	Che, Yong.,Zang, Qing.,Han, Xiaofeng.,Xiao, Shumei.,Huang, Kai.,...&Zhou, Jian.(2021).Two-dimensional simulation of an Ar/H-2 direct-current discharge plasma.AIP ADVANCES,11.
MLA	Che, Yong,et al."Two-dimensional simulation of an Ar/H-2 direct-current discharge plasma".AIP ADVANCES 11(2021).