Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial

doi:10.3389/fphy.2020.00267

	Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial
	Zhang, Weiguo 1,2; Zhu, Guodong 2; Zhu, Xiaoqiang 2; Du, Chunlei 1,2
刊名	FRONTIERS IN PHYSICS
	2020-08-28
卷号	8 页码:7
关键词	micron nano-fabrication spiral-structure matamaterial optics terahertz optics elements microoptics ultra-precision fabrication
ISSN号	2296-424X
DOI	10.3389/fphy.2020.00267
通讯作者	Du, Chunlei(cldu@cigit.ac.cn)
英文摘要	Spiral-structure metamaterial (SSM) is of great importance, however, there are fewer methods to fabricate SSM due to limitations of material particularity and working accuracy. In this paper, a systematic scheme for fabricating SSM is proposed by employing the metal mold making with diamond-based ultra-precision turning technique and then molding replication method. By studying the path planning algorithm of the turning, molding error law, and a technique of how to compensate for the error, a solution for SSM is consequently formed. Our experimental results show a satisfying SSM with a surface roughness under 5 nm and a surface shape error under 0.63% of the designed wavelength (30 um). Moreover, this SMM element is processed within 10 min, with low cost materials and processes. Based on these advantages, our SSM processing scheme shows a remarkable potential in precise fabricating phase plates and industrialized application of terahertz metamaterial in the future.
资助项目	Natural Science Foundation of China[61775213] ; Natural Science Foundation of Chongqing, China[cstc2019jcyj-msxmX0352]
WOS研究方向	Physics
语种	英语
出版者	FRONTIERS MEDIA SA
WOS记录号	WOS:000570416300001
内容类型	期刊论文
源URL	[http://119.78.100.138/handle/2HOD01W0/11823]
专题	中国科学院重庆绿色智能技术研究院
通讯作者	Du, Chunlei
作者单位	1.Chongqing Univ, Sch Optoelect Engn, Chongqing, Peoples R China 2.Chinese Acad Sci, Chongqing Inst Green & Intelligent Technol, Chongqing, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Weiguo,Zhu, Guodong,Zhu, Xiaoqiang,et al. Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial[J]. FRONTIERS IN PHYSICS,2020,8:7.
APA	Zhang, Weiguo,Zhu, Guodong,Zhu, Xiaoqiang,&Du, Chunlei.(2020).Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial.FRONTIERS IN PHYSICS,8,7.
MLA	Zhang, Weiguo,et al."Ultra-Precision Replication Technology for Fabricating Spiral-Structure Metamaterial".FRONTIERS IN PHYSICS 8(2020):7.