Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds

	Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds
	Xue Han 2,3; Bo Su 3; Bo Zhou 1,3; Youzhi Wu 2; Junhu Meng 3
刊名	Journal of Micromechanics and Microengineering
	2019-01-16
卷号	29 期号:3 页码:035002
语种	英语
内容类型	期刊论文
源URL	[http://ir.licp.cn/handle/362003/26810]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心
通讯作者	Youzhi Wu; Junhu Meng
作者单位	1.University of Chinese Academy of Sciences 2.School of Materials Science and Engineering, Lanzhou University of Technology 3.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences
推荐引用方式 GB/T 7714	Xue Han,Bo Su,Bo Zhou,et al. Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds[J]. Journal of Micromechanics and Microengineering,2019,29(3):035002.
APA	Xue Han,Bo Su,Bo Zhou,Youzhi Wu,&Junhu Meng.(2019).Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds.Journal of Micromechanics and Microengineering,29(3),035002.
MLA	Xue Han,et al."Soft lithographic fabrication of free-standing ceramic microparts using moisture-sensitive PDMS molds".Journal of Micromechanics and Microengineering 29.3(2019):035002.