Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 瞬态光学技术国家重点实验室

	Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE
	He YongNing ; Zhang JingWen ; Yang XiaoDong ; Xu QingAn ; Zhu ChangChun ; Hou Xun
刊名	science in china series e-technological sciences
	2007-06-01
卷号	50 期号:3 页码:290-301
关键词	ZnO thin film L-MBE dynamic mechanism
ISSN号	1006-9321
英文摘要	zno, as a wide-band gap semiconductor, has recently become a new research focus in the field of ultraviolet optoelectronic semiconductors. laser molecular beam epitaxy (l-mbe) is quite useful for the unit cell layer-by-layer epitaxial growth of zinc oxide thin films from the sintered ceramic target. the zno ceramic target with high purity was ablated by krf laser pulses in an ultra high vacuum to deposit zno thin film during the process of l-mbe. it is found that the deposition rate of zno thin film by l-mbe is much lower than that by conventional pulsed laser deposition (pld). based on the experimental phenomena in the zno thin film growth process and the thermal-controlling mechanism of the nanosecond (ns) pulsed laser ablation of zno ceramic target, the suggested effective ablating time during the pulse duration can explain the very low deposition rate of the zno film by l-mbe. the unique dynamic mechanism for growing zno thin film is analyzed. both the high energy of the deposition species and the low growth rate of the film are really beneficial for the l-mbe growth of the zno thin film with high crystallinity at low temperature.
学科主题	数理科学和化学
WOS标题词	science & technology ; technology
类目[WOS]	engineering, multidisciplinary ; materials science, multidisciplinary
研究领域[WOS]	engineering ; materials science
关键词[WOS]	room-temperature ; emission
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000247830000004
公开日期	2010-01-12
内容类型	期刊论文
源URL	[http://ir.opt.ac.cn/handle/181661/7226]
专题	西安光学精密机械研究所_瞬态光学技术国家重点实验室
作者单位	1.Xian Jiaotong Univ, Dept Elect Sci & Technol, Sch Elect & Informat Engn, Xian 710049, Peoples R China 2.Acad Sinica, Xian Inst Opt & Precis Mech, State Key Lab Transient Opt Technol, Xian 710068, Peoples R China
推荐引用方式 GB/T 7714	He YongNing,Zhang JingWen,Yang XiaoDong,et al. Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE[J]. science in china series e-technological sciences,2007,50(3):290-301.
APA	He YongNing,Zhang JingWen,Yang XiaoDong,Xu QingAn,Zhu ChangChun,&Hou Xun.(2007).Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE.science in china series e-technological sciences,50(3),290-301.
MLA	He YongNing,et al."Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE".science in china series e-technological sciences 50.3(2007):290-301.