A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation

doi:10.1007/s11633-020-1225-4

CORC > 自动化研究所 > 中国科学院自动化研究所 > 学术期刊 > International Journal of Automation and Computing

	A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation
	Maniza Armin 1; Priyo Nath Roy 2; Sajal Kumar Das 1
刊名	International Journal of Automation and Computing
	2020
卷号	17 期号:4 页码:479-501
关键词	Hysteresis nonlinearities piezoelectric actuator smart actuator atomic force microscope.
ISSN号	1476-8186
DOI	10.1007/s11633-020-1225-4
英文摘要	This paper surveys the recent advances on the modeling and control of hysteresis of piezoelectric actuators (PTAs) in the context of high precision applications of atomic force microscopes (AFMs). The current states, findings, and outcomes on hysteresis modeling and control in terms of achievable bandwidth and accuracy are discussed in detailed. Future challenges and the scope of possible research are presented to pave the way to video rate atomic force microscopy.
内容类型	期刊论文
源URL	[http://ir.ia.ac.cn/handle/173211/42274]
专题	自动化研究所_学术期刊_International Journal of Automation and Computing
作者单位	1.Department of Mechatronics Engineering, Rajshahi University of Engineering & Technology, Rajshahi 6204, Bangladesh 2.Department of Mechatronics Engineering, Khulna University of Engineering & Technology, Khulna 9203, Bangladesh
推荐引用方式 GB/T 7714	Maniza Armin,Priyo Nath Roy,Sajal Kumar Das. A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation[J]. International Journal of Automation and Computing,2020,17(4):479-501.
APA	Maniza Armin,Priyo Nath Roy,&Sajal Kumar Das.(2020).A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation.International Journal of Automation and Computing,17(4),479-501.
MLA	Maniza Armin,et al."A Survey on Modelling and Compensation for Hysteresis in High Speed Nanopositioning of AFMs: Observation and Future Recommendation".International Journal of Automation and Computing 17.4(2020):479-501.