Design and fabrication of an artificial compound eye for multi-spectral imaging

doi:10.3390/mi10030208

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Design and fabrication of an artificial compound eye for multi-spectral imaging
	Cao, Axiu 1,2; Pang, Hui 1; Zhang, Man 1; Shi, Lifang 1; Deng, Qiling 1; Hu, Song 1
刊名	Micromachines
	2019-03-25
卷号	10 期号:3
关键词	artificial compound eye multi-spectral imaging lithography spectral splitting
ISSN号	2072-666X
DOI	10.3390/mi10030208
文献子类	期刊论文
英文摘要	The artificial compound eye (ACE) structure is a new type of miniaturized, lightweight and intelligent imaging system. This paper has proposed to design a multi-spectral ACE structure to enable the structure to achieve multi-spectral information on the basis of imaging. The sub-eyes in the compound eye structure have been designed as diffractive beam splitting lenses with the same focal length of 20 mm, but with the different designed center wavelengths of 650 nm, 532 nm, and 445 nm, respectively. The proximity exposure lithography and reactive ion etching process were used to prepare the designed multi-spectral ACE structure, and the spectral splitting and multi-spectral imaging experiments were carried out to verify the multi-spectral imaging function of the structure without axial movement. Furthermore, the structure can be designed according to actual requirements, which can be applied to covert reconnaissance, camouflage identification, gas leakage or other fields. © 2019 by the authors.
WOS关键词	SPECTROSCOPY ; ARRAY
WOS研究方向	Nanoscience & Nanotechnology ; Instruments & Instrumentation
语种	英语
出版者	MDPI AG, Postfach, Basel, CH-4005, Switzerland
WOS记录号	WOS:000464423000002
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/9743]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu; 610209, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China
推荐引用方式 GB/T 7714	Cao, Axiu,Pang, Hui,Zhang, Man,et al. Design and fabrication of an artificial compound eye for multi-spectral imaging[J]. Micromachines,2019,10(3).
APA	Cao, Axiu,Pang, Hui,Zhang, Man,Shi, Lifang,Deng, Qiling,&Hu, Song.(2019).Design and fabrication of an artificial compound eye for multi-spectral imaging.Micromachines,10(3).
MLA	Cao, Axiu,et al."Design and fabrication of an artificial compound eye for multi-spectral imaging".Micromachines 10.3(2019).