Analysis of influence factors of surface defects detection on optical components | |
Deng Mingjie2,3,4; Shi Feng2,3,4; Sun Guoyan1; Xue Shuai2,3,4; Tie Guipeng2,3,4 | |
2020 | |
会议日期 | 2020-08-25 |
会议地点 | Xiamen, PEOPLES R CHINA |
关键词 | Surface defect Dark field Microscopic scattering imaging |
卷号 | 11567 |
DOI | 10.1117/12.2572696 |
英文摘要 | Most of the existing defect detectors focus on the size, location, depth and number of defects of the tested components. The instrument is usually large in size and requires high accuracy for the environment and motion devices. In contrast, the direct random bed motion, which aims at finding and locating defects, is highly efficient, low-cost and environmentally practical, while the research on vibration-resistant defect tester is rare.In order to solve this problem, based on the principle of micro-scattering imaging in dark field, a set of optical component surface defect detection device is built, and the influence factors of light intensity, illumination angle, wavelength and other defect detection factors are experimentally studied, in order to provide design basis for the follow-up development of on- line defect detection instrument. The experimental results show that the most important factor affecting the sensitivity is the azimuth angle and pitch angle of the incident light, which is more than 30 degrees between the incident light and the scratch direction. When the pitch angle is between 60 degrees and 70 degrees, the higher detection sensitivity can be obtained. In addition, improving the illumination intensity can help to improve the detection of defects. In the visible range, the wavelength has little effect on the sensitivity. |
产权排序 | 4 |
会议录 | AOPC 2020: OPTICAL SENSING AND IMAGING TECHNOLOGY |
会议录出版者 | SPIE-INT SOC OPTICAL ENGINEERING |
语种 | 英语 |
ISSN号 | 0277-786X;1996-758X |
ISBN号 | 978-1-5106-3956-0 |
WOS记录号 | WOS:000651815600003 |
内容类型 | 会议论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/94775] |
专题 | 先进光学元件试制中心 |
通讯作者 | Shi Feng |
作者单位 | 1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Xian 710119, Peoples R China 2.Natl Univ Def Technol, Lab Sci & Technol Integrated Logist Support, Changsha, Hunan, Peoples R China 3.Hunan Key Lab Ultraprecis Machining Technol, Changsha, Hunan, Peoples R China 4.Natl Univ Def Technol, Coll Intelligent Sci, Changsha, Hunan, Peoples R China |
推荐引用方式 GB/T 7714 | Deng Mingjie,Shi Feng,Sun Guoyan,et al. Analysis of influence factors of surface defects detection on optical components[C]. 见:. Xiamen, PEOPLES R CHINA. 2020-08-25. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论