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	Processes for Making Reliable VCSEL Devices and VCSEL arrays
	WANG, QING; SEURIN, JEAN-FRANCOIS; GHOSH, CHUNI L.; WATKINS, LAURENCE S.
	2015-09-10
著作权人	PRINCETON OPTRONICS INC.
专利号	US20150255955A1
国家	美国
文献子类	发明申请
其他题名	Processes for Making Reliable VCSEL Devices and VCSEL arrays
英文摘要	A set of VCSEL fabrication methods has been invented which enhance the performance and long time reliability of VCSEL devices and arrays of devices. Wafer bow caused by growing a large number of epitaxial layers required to fabricate VCSEL device generates strain and results in bowing/warping of the device wafer. The stress so generated is eliminated by applying a stress compensation layer on the substrate to a surface opposite to the epitaxial layer surface. New oxidation equipment designs and process parameters are described which produce more precision apertures and reduce stress in the VCSEL device. An ultrathin fabrication procedure is described which enables high power VCSELs to be made for high power operation at many different wavelengths. A low temperature electrical contacting process improves VCSEL long term reliability.
公开日期	2015-09-10
申请日期	2015-03-02
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/91632]
专题	半导体激光器专利数据库
作者单位	PRINCETON OPTRONICS INC.
推荐引用方式 GB/T 7714	WANG, QING,SEURIN, JEAN-FRANCOIS,GHOSH, CHUNI L.,et al. Processes for Making Reliable VCSEL Devices and VCSEL arrays. US20150255955A1. 2015-09-10.

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