Visible light semiconductor laser | |
SUGANO HIKARI | |
1992-08-04 | |
著作权人 | NEC CORP |
专利号 | JP1992213886A |
国家 | 日本 |
文献子类 | 发明申请 |
其他题名 | Visible light semiconductor laser |
英文摘要 | PURPOSE:To enable a semiconductor laser to be enhanced in carrier concentration and lessened in threshold current and heat release value without increasing it in crystal defect by a method wherein carbon is made to serve as dopant of a P-side clad layer. CONSTITUTION:An N-(Al0.7Ga0.3)0.5In0.5P clad layer 2 and a Ga0.5In0.5P active layer 3 are formed on an N-GaAs substrate Then, a P-(Al0.7Ga0.3)0.5In0.5P clad layer 4 is provided. At this point, if a growth temperature is set to 600 deg.C or below, carbon generated due to the thermal decomposition of methyl groups is introduced into the clad layer 4 to turn it into a P-type. Then, an SiO2 film is formed on the P-side clad layer 4, the SiO2 film and the P-side clad layer 4 are partially removed excluding a light emitting region, and an N-GaAs current blocking layer 5 is selectively grown through an epitaxial growth method on a region where the SiO2 film and the P-side clad layer 4 have been removed to constitute a waveguide. Thereafter, the residual SiO2 film is removed, and a P-GaAs cap layer is epitaxially grown. |
公开日期 | 1992-08-04 |
申请日期 | 1990-12-11 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/88969] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NEC CORP |
推荐引用方式 GB/T 7714 | SUGANO HIKARI. Visible light semiconductor laser. JP1992213886A. 1992-08-04. |
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