結晶成長方法
大川 和宏; 三露 常男; 山崎 攻
1995-03-06
著作权人松下電器産業株式会社
专利号JP1995019783B2
国家日本
文献子类授权发明
其他题名結晶成長方法
英文摘要PURPOSE:To increase carrier density, and to lower resistivity by irradiating zinc selenide or zinc sulfide-selenide by beams of particles containing zinc chloride or hydrogen chloride or chlorine gas through a molecular-beam epitaxy. CONSTITUTION:The upper section of a substratel is irradiated by selenium 5 and sulfur and zinc 4 as molecular beams by using a molecular beam epitaxy, thus growing a zinc selenide crystal 3 or a zinc sulfide-selenide crystal. The upper section of the substrate 1 is irradiated simultaneously by the molecular beams of zinc chloride 6 or hydrogen chloride or chlorine gas, thus adding chlorine to the zinc selenide crystal 3 or the zinc sulfide-selenide crystal as an impurity. Accordingly, carrier density is increased, and resistivity is lowered.
公开日期1995-03-06
申请日期1986-05-20
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/87411]  
专题半导体激光器专利数据库
作者单位松下電器産業株式会社
推荐引用方式
GB/T 7714
大川 和宏,三露 常男,山崎 攻. 結晶成長方法. JP1995019783B2. 1995-03-06.
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