Optical semiconductor equipment
NAKAHARA, KOUJI; TSUCHIYA, TOMONOBU; TAIKE, AKIRA; SHINODA, KAZUNORI
2004-05-27
著作权人LUMENTUM JAPAN, INC.
专利号US20040099859A1
国家美国
文献子类发明申请
其他题名Optical semiconductor equipment
英文摘要The prior art distributed feedback laser having an InGaAlAs active layer involves a problem that its laser characteristics are deteriorated at high temperature due to the high device resistance. According to the present invention, a ridge type laser is fabricated by: forming an InGaAlAs-MQW layer 104 on a n-type InP substrate 101; growing a p-type InGaAlAs-GRIN-SCH layer 105, a p-type InAlAs electron stopping layer 106 and a p-type grating layer 107 in this order on the InGaAlAs-MQW layer 104; forming a grating; and regrowing a p-type InP cladding layer 108 and a p-type InGaAs contact layer in this order. The concave depth of the grating is smaller than the thickness of the p-type grating layer 107.
公开日期2004-05-27
申请日期2003-06-27
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/86906]  
专题半导体激光器专利数据库
作者单位LUMENTUM JAPAN, INC.
推荐引用方式
GB/T 7714
NAKAHARA, KOUJI,TSUCHIYA, TOMONOBU,TAIKE, AKIRA,et al. Optical semiconductor equipment. US20040099859A1. 2004-05-27.
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