Semiconductor light emitting device
MOGI NAOTO; HATAGOSHI GENICHI; WATANABE YUKIO; SHIMADA NAOHIRO
1988-02-25
著作权人TOSHIBA CORP
专利号JP1988044784A
国家日本
文献子类发明申请
其他题名Semiconductor light emitting device
英文摘要PURPOSE:To provide an effective element structure so that an emission element having a bottleneck structure of internal electric current will be excellent in durability by having a configuration of device where its structure causes an electric current to flow under a dielectric film from an electrode portion and also flow toward a light emitting region. CONSTITUTION:Epitaxial growth treatment are carried out at a clad layer 12, an active layer 13, the clad layer 14 and a current bottleneck layer 15 in sequence on a substrate crystal 11 and a stripe-like groove is formed from the surface of growth layer, having a groove width of 2 mum. At the growth crystal surface, furthermore, an optical waveguide layer 16, the second clad layer 17 and a contact layer 18 are formed and then, at the crystal surface an SiO2 film of 500 Angstrom in thickness is vapor-deposited after the substrate 11 has been ground up to the subscribed thickness, an electrode layer 20 is vapor-deposited. Moreover, the SiO2 film with the exception of its dimensions of 50 mum extending on both sides from a center of the stripe-like groove part is removed with etching treatment to form an electrode barrier layer 19. Furthermore, the electrode layer 21 is formed on the contact layer 18 and supposing that its layer is cut into the prescribed sizes, no outstanding increase in a working current will be found, even though respective operations are performed for one thousand hours or more. Thus, an introduction of the electrode barrier layer prevents incursion of heavy-metal ion and assures an improvement of relability.
公开日期1988-02-25
申请日期1986-08-12
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/84006]  
专题半导体激光器专利数据库
作者单位TOSHIBA CORP
推荐引用方式
GB/T 7714
MOGI NAOTO,HATAGOSHI GENICHI,WATANABE YUKIO,et al. Semiconductor light emitting device. JP1988044784A. 1988-02-25.
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