Research on Microhole Processing Technology Based on the Femtosecond-Laser Spiral Trepanning Method | |
Li, Fengping2,3; Feng, Guang2; Yang, Xiaojun1; Li, Xiaogang2; Ma, Guang2; Lu, Chengji2 | |
刊名 | APPLIED SCIENCES-BASEL |
2020-11 | |
卷号 | 10期号:21 |
关键词 | femtosecond machining microholes spiral trepanning |
ISSN号 | 2076-3417 |
DOI | 10.3390/app10217508 |
产权排序 | 3 |
英文摘要 | Featured Application Film hole; fuel injection nozzle; microfluidic chips. Microholes have crucial applications in aerospace, the automotive industry, and other industries. In this study, the microhole processing technology based on the femtosecond-laser spiral trepanning method was investigated. By adjusting the spiral scanning path, laser power distribution, and defocusing amount to control laser energy distribution, an inverted cone hole, straight hole, and normal cone hole were obtained finally. The morphology and element of the microhole were investigated by scanning electron microscopy (SEM) equipped with energy-dispersive X-ray spectroscopy (EDX). The experimental results of the femtosecond-laser spiral trepanning method could achieve fewer impurities. Finally, the formation mechanisms of different microholes are explained in detail. The method is simpler and more efficient than the traditional microhole processing technology. The femtosecond-laser spiral trepanning method with controllable hole roundness, accuracy, and taper has important practical significance in microhole processing. |
语种 | 英语 |
出版者 | MDPI |
WOS记录号 | WOS:000589028100001 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/93891] |
专题 | 西安光学精密机械研究所_光子制造中心 |
通讯作者 | Li, Fengping |
作者单位 | 1.Chinese Acad Sci, Xian Inst Opt & Precis Mech, Xian 710119, Peoples R China 2.Wenzhou Univ, Zhejiang Prov Engn Lab Laser & Optoelect Intellig, Wenzhou 325035, Peoples R China 3.Xiamen Univ, Sch Aerosp Engn, Xiamen 361005, Peoples R China |
推荐引用方式 GB/T 7714 | Li, Fengping,Feng, Guang,Yang, Xiaojun,et al. Research on Microhole Processing Technology Based on the Femtosecond-Laser Spiral Trepanning Method[J]. APPLIED SCIENCES-BASEL,2020,10(21). |
APA | Li, Fengping,Feng, Guang,Yang, Xiaojun,Li, Xiaogang,Ma, Guang,&Lu, Chengji.(2020).Research on Microhole Processing Technology Based on the Femtosecond-Laser Spiral Trepanning Method.APPLIED SCIENCES-BASEL,10(21). |
MLA | Li, Fengping,et al."Research on Microhole Processing Technology Based on the Femtosecond-Laser Spiral Trepanning Method".APPLIED SCIENCES-BASEL 10.21(2020). |
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