Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering

doi:10.1016/j.vacuum.2020.109406

	Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering
	Sun, Li 1; Ruan, Ting 1; Yuan, Zhigang 2; Fang, Qianfeng 3; Gong, Wenbang 1; Wu, Xiao 2; Mei, Shunqi 1
刊名	VACUUM
	2020-07-01
卷号	177
关键词	Mo2N+MoS2 coating Magnetron sputtering X-ray diffraction Hardness Friction coefficient
ISSN号	0042-207X
DOI	10.1016/j.vacuum.2020.109406
通讯作者	Yuan, Zhigang(yuanzhigang@wtu.edu.cn)
英文摘要	In order to investigate the microstructures and properties of Mo2N + MoS2 coatings, MoS2, Mo2N and Mo2N + MoS2 coatings were deposited by direct current magnetron sputtering. The crystalline structure, surface and cross-sectional morphology, hardness and friction coefficient are characterized by X-ray diffraction, field emission scanning electron microscopy, nanoindentation and sliding tester, respectively. The results indicate that the Mo2N + MoS2 composite coatings are composed of Mo2N and MoS2 phases, but the (002) crystalline orientation of MoS2 phase is not detected in the composite coatings. The composite coatings display fine and compact columnar layer structure. The hardness and friction coefficient of composite coatings are about 17 GPa and 0.4, respectively. Compared with pure MoS2 or Mo2N, the overall performance of composite coatings is improved, which is attributed to the change of coating microstructures.
资助项目	National Natural Science Foundation of China[11904268] ; Department of Science and Technology, Hubei Provincial People's Government[2019CFB613]
WOS关键词	COMPOSITE COATINGS ; TRIBOLOGICAL PROPERTIES ; WEAR BEHAVIOR ; FILMS ; ORIENTATION ; SYSTEMS ; GROWTH ; DRY
WOS研究方向	Materials Science ; Physics
语种	英语
出版者	PERGAMON-ELSEVIER SCIENCE LTD
WOS记录号	WOS:000538148400052
资助机构	National Natural Science Foundation of China ; Department of Science and Technology, Hubei Provincial People's Government
内容类型	期刊论文
源URL	[http://ir.hfcas.ac.cn:8080/handle/334002/103085]
专题	中国科学院合肥物质科学研究院
通讯作者	Yuan, Zhigang
作者单位	1.Wuhan Text Univ, Hubei Key Lab Digital Text Equipment, Wuhan 430073, Peoples R China 2.Wuhan Text Univ, Sch Mech Engn & Automat, Wuhan 430073, Peoples R China 3.Chinese Acad Sci, Inst Solid State Phys, Key Lab Mat Phys, Hefei 230031, Peoples R China
推荐引用方式 GB/T 7714	Sun, Li,Ruan, Ting,Yuan, Zhigang,et al. Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering[J]. VACUUM,2020,177.
APA	Sun, Li.,Ruan, Ting.,Yuan, Zhigang.,Fang, Qianfeng.,Gong, Wenbang.,...&Mei, Shunqi.(2020).Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering.VACUUM,177.
MLA	Sun, Li,et al."Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering".VACUUM 177(2020).