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	HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface
	Guiying Shen;   Youwen Zhao;   Jing Sun;   Jingming Liu;   Hui Xie;   Jun Yang;  Zhiyuan Dong
刊名	JOURNAL OF CRYSTAL GROWTH
	2020
卷号	547页码:125800
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/30096]
专题	半导体研究所_中科院半导体材料科学重点实验室
推荐引用方式 GB/T 7714	Guiying Shen; Youwen Zhao; Jing Sun; Jingming Liu; Hui Xie; Jun Yang;Zhiyuan Dong. HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface[J]. JOURNAL OF CRYSTAL GROWTH,2020,547:125800.
APA	Guiying Shen; Youwen Zhao; Jing Sun; Jingming Liu; Hui Xie; Jun Yang;Zhiyuan Dong.(2020).HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface.JOURNAL OF CRYSTAL GROWTH,547,125800.
MLA	Guiying Shen; Youwen Zhao; Jing Sun; Jingming Liu; Hui Xie; Jun Yang;Zhiyuan Dong."HCl-H2SO4-H2O solution etching behavior of InAs (1 0 0) surface".JOURNAL OF CRYSTAL GROWTH 547(2020):125800.

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