Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study

	Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study
	Meng, Fanping; Ge, Fangfang; Chen, Yuyun; Xu, Genbao; Huang, Feng
刊名	SURFACE & COATINGS TECHNOLOGY
	2019
卷号	365 页码:2019-02-09
关键词	X-RAY-ABSORPTION ELECTRONIC-STRUCTURE SPECTROSCOPY OXIDE SCATTERING GA
DOI	10.1016/j.surfcoat.2018.04.013
英文摘要	Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/18303]
专题	2019专题
作者单位	Huang, F (reprint author), Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China.
推荐引用方式 GB/T 7714	Meng, Fanping,Ge, Fangfang,Chen, Yuyun,et al. Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study[J]. SURFACE & COATINGS TECHNOLOGY,2019,365:2019-02-09.
APA	Meng, Fanping,Ge, Fangfang,Chen, Yuyun,Xu, Genbao,&Huang, Feng.(2019).Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study.SURFACE & COATINGS TECHNOLOGY,365,2019-02-09.
MLA	Meng, Fanping,et al."Local structural changes induced by ion bombardment in magnetron sputtered ZnO: Al films: Raman, XPS, and XAS study".SURFACE & COATINGS TECHNOLOGY 365(2019):2019-02-09.