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	Substrate for optical circuit
	WASA KIYOTAKA; KAWAGUCHI TAKAO; KICHI KENZOU; MITSUYU TSUNEO
	1982-10-07
著作权人	MATSUSHITA DENKI SANGYO KK
专利号	JP1982163207A
国家	日本
文献子类	发明申请
其他题名	Substrate for optical circuit
英文摘要	PURPOSE:To obtain the titled substrate having a smoothed surface for transmission of the light and an optical waveguide having a clear boundary, by coating an amorphous thin layer on the inner side wall of a U-shaped groove provided on the surface of a crystalline substrate and then burying an optical waveguide into the U-shaped groove. CONSTITUTION:A U-shaped groove 21 is formed on the surface of a crystalline substrate 22 made of one of MgO, alpha-Al2O3, spinel, SrTiO3, etc. An amorphous material like the quartz glass, the silica glass, the borosilicate glass, etc. is vapor-deposited into the groove 21 by an extent equivalent to the depth of the groove 2 The center part of the amorphous material is removed so as to expose the substrate 22, and an amorphous thin layer 23 is formed on the inner wall surface of the groove 2 Then a crystalline light transmitting medium of BaTiO3, PbTiO3, the PLZT group compound, etc. having a larger refractive index of light than the substrate 22 and the layer 23 is buried into the groove 21 to form an optical waveguide 24. Thus the width accuracy of the waveguide 24 can be set at <=1mum to obtain a small-sized thin film waveguide having high performance.
公开日期	1982-10-07
申请日期	1981-03-31
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/64681]
专题	半导体激光器专利数据库
作者单位	MATSUSHITA DENKI SANGYO KK
推荐引用方式 GB/T 7714	WASA KIYOTAKA,KAWAGUCHI TAKAO,KICHI KENZOU,et al. Substrate for optical circuit. JP1982163207A. 1982-10-07.

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