Laser-based separation method
BEYER, CHRISTIAN; RICHTER, JAN
2017-11-16
著作权人SILTECTRA GMBH
专利号US20170330800A1
国家美国
文献子类发明申请
其他题名Laser-based separation method
英文摘要The invention relates to a method for creating a detachment area (2) in a solid (1), in particular for detaching the solid (1) along the separating region (2). Said solid portion (12) that is to be detached is thinner than the solid body (1) from which the solid portion (12) has been removed. According to the invention, said method preferably comprises at least the following steps: the crystal lattice of the solid (1) is modified by means of a modifying agent, in particular by means of at least one laser, in particular a pico- or femtosecond laser. The modifications, in particular the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) which is to be detached, several modifications (9) are created in the crystal lattice, said crystal lattice penetrates, following said modifications (9), in the areas surrounding the modifications (9), at least in one particular part.
公开日期2017-11-16
申请日期2015-11-27
状态申请中
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/62083]  
专题半导体激光器专利数据库
作者单位SILTECTRA GMBH
推荐引用方式
GB/T 7714
BEYER, CHRISTIAN,RICHTER, JAN. Laser-based separation method. US20170330800A1. 2017-11-16.
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