Laser-based separation method | |
BEYER, CHRISTIAN; RICHTER, JAN | |
2017-11-16 | |
著作权人 | SILTECTRA GMBH |
专利号 | US20170330800A1 |
国家 | 美国 |
文献子类 | 发明申请 |
其他题名 | Laser-based separation method |
英文摘要 | The invention relates to a method for creating a detachment area (2) in a solid (1), in particular for detaching the solid (1) along the separating region (2). Said solid portion (12) that is to be detached is thinner than the solid body (1) from which the solid portion (12) has been removed. According to the invention, said method preferably comprises at least the following steps: the crystal lattice of the solid (1) is modified by means of a modifying agent, in particular by means of at least one laser, in particular a pico- or femtosecond laser. The modifications, in particular the laser beams penetrate into the solid (1) via a surface (5) of the solid portion (12) which is to be detached, several modifications (9) are created in the crystal lattice, said crystal lattice penetrates, following said modifications (9), in the areas surrounding the modifications (9), at least in one particular part. |
公开日期 | 2017-11-16 |
申请日期 | 2015-11-27 |
状态 | 申请中 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/62083] |
专题 | 半导体激光器专利数据库 |
作者单位 | SILTECTRA GMBH |
推荐引用方式 GB/T 7714 | BEYER, CHRISTIAN,RICHTER, JAN. Laser-based separation method. US20170330800A1. 2017-11-16. |
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