Method for producing nitride semiconductor laser light source and apparatus for producing nitride semiconductor laser light source
HANAOKA, DAISUKE; ISHIDA, MASAYA; OGAWA, ATSUSHI; TANI, YOSHIHIKO; ISHIKURA, TAKURO
2011-07-21
著作权人HANAOKA DAISUKE
专利号US20110174288A1
国家美国
文献子类发明申请
其他题名Method for producing nitride semiconductor laser light source and apparatus for producing nitride semiconductor laser light source
英文摘要A method for producing a nitride semiconductor laser light source is provided. The nitride semiconductor laser light source has a nitride semiconductor laser chip, a stem for mounting the laser chip thereon, and a cap for covering the laser chip. The laser chip is encapsulated in a sealed container composed of the stem and the cap. The method for producing this nitride semiconductor laser light source has a cleaning step of cleaning the surface of the laser chip, the stem, or the cap. In the cleaning step, the laser chip, the stem, or the cap is exposed with ozone or an excited oxygen atom, or baked by heat. The method also has, after the cleaning step, a capping step of encapsulating the laser chip in the sealed container composed of the stem and the cap. During the capping step, the cleaned surface of the laser chip, the stem, or the cap is kept clean. This method provides a long-life nitride semiconductor laser light source the light emission intensity of which is not easily reduced after a long period of use.
公开日期2011-07-21
申请日期2011-03-30
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/58639]  
专题半导体激光器专利数据库
作者单位HANAOKA DAISUKE
推荐引用方式
GB/T 7714
HANAOKA, DAISUKE,ISHIDA, MASAYA,OGAWA, ATSUSHI,et al. Method for producing nitride semiconductor laser light source and apparatus for producing nitride semiconductor laser light source. US20110174288A1. 2011-07-21.
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