Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation
	Huang DM(黄德明)1,2; Pu JB(蒲吉斌)1,2 ; Lu ZB(鲁志斌)1 ; Xue QJ(薛群基)1
刊名	Surface and Interface Analysis
	2012
卷号	44 期号:7 页码:837-843
关键词	graphite-like carbon molecular dynamics silicon substrate internal stress surface roughness
ISSN号	0142-2421
通讯作者	鲁志斌
英文摘要	Molecular dynamics simulations are performed on the atomic origin of the growth process of graphite-like carbon film on silicon substrate. The microstructure, mass density, and internal stress of as-deposited films are investigated systematically. A strong energy dependence of microstructure and stress is revealed by varying the impact energy of the incident atoms (in the range 1–120 eV). As the impact energy is increased, the film internal stress converts from tensile stress to compressive stress, which is in agreement with the experimental results, and the bonding of C-Si in the film is also increased for more substrate atoms are sputtered into the grown film. At the incident energy 40 eV, a densification of the deposited material is observed and the properties such as density, sp³ fraction, and compressive stress all reach their maximums. In addition, the effect of impact energy on the surface roughness is also studied. The surface morphology of the film exhibits different characteristics with different incident energy. When the energy is low (<40 eV), the surface roughness is reduced with the increasing of incident energy, and it reaches the minimum at 50 eV.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	National Natural Science Foundation of China (Grant No.50905178);National Key Basic Research Program (No. 2011CB706603)
语种	英语
WOS记录号	WOS:000305075900006
公开日期	2013-07-12
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/3466]
专题	兰州化学物理研究所_固体润滑国家重点实验室
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Huang DM,Pu JB,Lu ZB,et al. Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation[J]. Surface and Interface Analysis,2012,44(7):837-843.
APA	Huang DM,Pu JB,Lu ZB,&Xue QJ.(2012).Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation.Surface and Interface Analysis,44(7),837-843.
MLA	Huang DM,et al."Microstructure and surface roughness of graphite-like carbon films deposited on silicon substrate by molecular dynamic simulation".Surface and Interface Analysis 44.7(2012):837-843.