Superior tribological properties of an amorphous carbon film with a graphite-like structure

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	Superior tribological properties of an amorphous carbon film with a graphite-like structure
	Wang YJ(王永军)1,2; Li HX(李红轩)1 ; Ji L(吉利)1 ; Liu XH(刘晓红)1 ; Wu YX(吴艳霞)1,2 ; Zhou HD(周惠娣)1 ; Chen JM(陈建敏)1
刊名	Chinese Physics B
	2012
卷号	21 期号:1 页码:016101(1-9)
关键词	magnetron sputtering graphite-like carbon film microstructure performance
ISSN号	1674-1056
通讯作者	陈建敏
英文摘要	Amorphous carbon ﬁlms with high sp² concentrations are deposited by unbalanced magnetron sputtering with a narrow range of substrate bias voltage. Field emission scanning electron microscopes (FESEMs), high resolution transmission electron microscopes (HRTEMs), atomic force microscopes (AFMs), the Raman spectrometers, nanoindentation, and tribometers are subsequently used to characterize the microstructures and the properties of the resulting ﬁlms. It is found that the present ﬁlms are dominated by the sp² sites. However, the ﬁlms demonstrate a moderate hardness together with a low internal stress. The high hardness of the deposited ﬁlm originates from the crosslinking of the sp² clusters by the sp³ sites. The presence of the graphite-like clusters in the ﬁlm structure may be responsible for the low internal stress. What is more important is that the resulting ﬁlms show excellent tribological properties with high load capacity and excellent wear resistance in humid atmospheres. The relationship between the microstructure determined by the deposition condition and the ﬁlm characteristic is discussed in detail.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the National Natural Science Foundation of China (Grant Nos. 50705093;50575217);the Innovative Group Foundation of the National Natural Science Foundation of China (Grant No. 50421502);the National Basic Research Program of China (Grant No. 2007CB607601)
语种	英语
WOS记录号	WOS:000300258200049
公开日期	2013-07-12
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/3314]
专题	兰州化学物理研究所_固体润滑国家重点实验室兰州化学物理研究所_先进润滑与防护材料研究发展中心
作者单位	1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Wang YJ,Li HX,Ji L,et al. Superior tribological properties of an amorphous carbon film with a graphite-like structure[J]. Chinese Physics B,2012,21(1):016101(1-9).
APA	Wang YJ.,Li HX.,Ji L.,Liu XH.,Wu YX.,...&Chen JM.(2012).Superior tribological properties of an amorphous carbon film with a graphite-like structure.Chinese Physics B,21(1),016101(1-9).
MLA	Wang YJ,et al."Superior tribological properties of an amorphous carbon film with a graphite-like structure".Chinese Physics B 21.1(2012):016101(1-9).