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	VCSEL with an intergrated heat sink and method of making
	SHIEH, CHAN-LONG; LUNGO, JOHN; LEBBY, MICHAEL S.
	1996-01-09
著作权人	FINISAR CORPORATION
专利号	US5482891
国家	美国
文献子类	授权发明
其他题名	VCSEL with an intergrated heat sink and method of making
英文摘要	A substrate (102) having a surface (103) with a first stack of distributed Bragg reflectors (106), a first cladding region (107), an active region (108), a second cladding region (109), a second stack of distributed Bragg reflectors (110), and a contact region (111) is provided. A mesa (131) with a surface (133) and a trench (136) is formed. A first dielectric layer (122) is formed overlying substrate (102) and covering a portion of trench (136). A seed layer (126) having a pattern is formed, with the pattern of seed layer (126) having an opening on a portion of mesa (131). A metal is selectively plated on seed layer (126), thereby generating a layer (304) on seed layer (126) for removal of heat of VCSEL (101).
公开日期	1996-01-09
申请日期	1995-03-17
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/48679]
专题	半导体激光器专利数据库
作者单位	FINISAR CORPORATION
推荐引用方式 GB/T 7714	SHIEH, CHAN-LONG,LUNGO, JOHN,LEBBY, MICHAEL S.. VCSEL with an intergrated heat sink and method of making. US5482891. 1996-01-09.

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