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	VCSEL for high speed lower power optical link
	NAKAGAWA, SHIGERU
	2009-03-10
著作权人	INTERNATIONAL BUSINESS MACHINE CORPORATION
专利号	US7501294
国家	美国
文献子类	授权发明
其他题名	VCSEL for high speed lower power optical link
英文摘要	A method of manufacturing a coherent light generator, especially a vertical cavity surface emitting laser (VCSEL), includes a gallium based semiconductor alloy substrate, a first DBR stack over the substrate, a first n-type clad layer over the first DBR stack, an active region containing quantum wells over the first n-type clad, a tunnel junction having an n-type and a p-type material and a boundary over the active region so that there is a standing wave null at an operating wavelength at the n-type/p-type boundary in the tunnel junction, a second n-type clad layer over the tunnel junction, an oxide aperture at least partially installed in the second n-type clad layer, and the second DBR stack over the second n-type clad of the coherent light generator. The novel VCSEL provides minimized internal optical absorption and has a low electrical resistance.
公开日期	2009-03-10
申请日期	2008-02-18
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/48616]
专题	半导体激光器专利数据库
作者单位	INTERNATIONAL BUSINESS MACHINE CORPORATION
推荐引用方式 GB/T 7714	NAKAGAWA, SHIGERU. VCSEL for high speed lower power optical link. US7501294. 2009-03-10.

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