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	Method of manufacturing VCSEL arrays using vapor phase epitaxy to achieve uniform device-to-device operating characteristics
	COCKERILL, TIMOTHY M.; BRYAN, ROBERT P.
	1999-11-02
著作权人	OPTICAL COMMUNICATION PRODUCTS, INC.
专利号	US5976905
国家	美国
文献子类	授权发明
其他题名	Method of manufacturing VCSEL arrays using vapor phase epitaxy to achieve uniform device-to-device operating characteristics
英文摘要	An array of infrared vertical cavity surface-emitting lasers (VCSELs) and method of manufacturing the same is disclosed which reduces device-to-device non-uniformity for VCSEL arrays manufactured using well-known vapor phase epitaxial processes. The method involves growing layers comprising a standard infrared VCSEL array using a vapor phase epitaxial process on a substrate which is mosoriented from the (100) plane in the {111}A direction by preferably between eight and twelve degrees or more.
公开日期	1999-11-02
申请日期	1996-02-16
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/46667]
专题	半导体激光器专利数据库
作者单位	OPTICAL COMMUNICATION PRODUCTS, INC.
推荐引用方式 GB/T 7714	COCKERILL, TIMOTHY M.,BRYAN, ROBERT P.. Method of manufacturing VCSEL arrays using vapor phase epitaxy to achieve uniform device-to-device operating characteristics. US5976905. 1999-11-02.

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