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	Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
	SHOUJI, HIROYOSHI; SATO, SHUNICHI; ISHII, TOSHIHIRO; MAKITA, KENGO; HAYASHI, MASAHIRO; SASAKI, TOSHIHIDE; ITOH, AKIHIRO
	2013-04-09
著作权人	RICOH COMPANY, LTD.
专利号	US8416822
国家	美国
文献子类	授权发明
其他题名	Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
英文摘要	A manufacturing method for manufacturing a surface-emitting laser device includes the steps of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on a substrate; etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof; selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide; forming a separating groove at a position away from the mesa structure; passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed; and coating a passivated part with a dielectric body.
公开日期	2013-04-09
申请日期	2009-11-12
状态	授权
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/45624]
专题	半导体激光器专利数据库
作者单位	RICOH COMPANY, LTD.
推荐引用方式 GB/T 7714	SHOUJI, HIROYOSHI,SATO, SHUNICHI,ISHII, TOSHIHIRO,et al. Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus. US8416822. 2013-04-09.

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