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	Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
	WANG, PEIDONG; TAYEBATI, PARVIZ; VAKHSHOORI, DARYOOSH
	2004-06-01
著作权人	NORTEL NETWORKS LIMITED
专利号	US6744805
国家	美国
文献子类	授权发明
其他题名	Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers
英文摘要	A method is provided for fabricating microelectromechanically tunable vertical-cavity surface-emitting lasers with precise lateral and vertical dimensional control. Microelectromechanical tunable vertical cavity surface emitting laser structures are also provided which include a suspended membrane structure made of a dielectric/metal membrane or metal film that supports a cavity-tuning reflective dielectric film stack while being anchored at the perimeter by metal support post(s). Tuning is achieved by translational movement of the cavity-tuning reflective dielectric film stack in a controlled electrostatic field. The current invention deals with the intracavity electrical contacts for current injection for this type of MEM-tunable VCSEL's. The current invention also includes various mechanisms to control the current injection profile so as to ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL's.
公开日期	2004-06-01
申请日期	2002-09-26
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/45108]
专题	半导体激光器专利数据库
作者单位	NORTEL NETWORKS LIMITED
推荐引用方式 GB/T 7714	WANG, PEIDONG,TAYEBATI, PARVIZ,VAKHSHOORI, DARYOOSH. Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers. US6744805. 2004-06-01.

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