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	Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates
	Jin, S; Bender, H; Li, XN; Zhang, Z; Dong, C; Gong, ZX; Ma, TC
刊名	APPLIED SURFACE SCIENCE
	1997
卷号	115页码:116-123
ISSN号	0169-4332
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/6524359
专题	大连理工大学
作者单位	1.CHINESE ACAD SCI,BEIJING LAB ELECTRON MICROSCOPY,BEIJING 100080,PEOPLES R CHINA. 2.DALIAN UNIV TECHNOL,NATL LAB MAT MODIFICAT LASER ION & ELECTRON BEAMS,DALIAN 116024,PEOPLES R CHINA. 3.DALIAN UNIV TECHNOL,DEPT MAT SCI & ENGN,DALIAN 116024,PEOPLES R CHINA. 4.IMEC,KAPELDREEF 75,B-3001 LOUVAIN,BELGIUM.
推荐引用方式 GB/T 7714	Jin, S,Bender, H,Li, XN,et al. Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates[J]. APPLIED SURFACE SCIENCE,1997,115:116-123.
APA	Jin, S.,Bender, H.,Li, XN.,Zhang, Z.,Dong, C.,...&Ma, TC.(1997).Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates.APPLIED SURFACE SCIENCE,115,116-123.
MLA	Jin, S,et al."Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates".APPLIED SURFACE SCIENCE 115(1997):116-123.

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