Amorphous silicon nanoparticles in compound films grown on cold substrates for high-efficiency photoluminescence

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	Amorphous silicon nanoparticles in compound films grown on cold substrates for high-efficiency photoluminescence
	Wang YQ ; Chen WD ; Liao XB ; Cao ZX
刊名	nanotechnology
	2003
卷号	14 期号:11 页码:1235-1238
关键词	SI NANOCRYSTALS LUMINESCENCE
ISSN号	0957-4484
通讯作者	cao zx,state key lab surface phys,inst phys,pob 603,beijing 100080,peoples r china.
中文摘要	silicon nanoparticles have been fabricated in both oxide and nitride matrices by using plasma-enhanced chemical vapour deposition, for which a low substrate temperature down to 50 degreesc turns out to be most favourable. high-rate deposition onto such a cold substrate results in the formation of nanoscaled silicon particles, which have revealed an amorphous nature under transmission electron microscope (tem) examination. the particle size can be readily controlled below 3.0 nm, and the number density amounts to over 10(12) cm(-2), as calculated from the tem micrographs. strong photoluminescence in the whole visible light range has been observed in the as-deposited si-in-siox and si-in-sinx thin films. without altering the size or structure of the particles, a post-annealing at 300 degreesc for 2 min raised the photoluminescence efficiency to a level comparable to the achievements with nanocrystalline si-in-sio2 samples prepared at high temperature. this low-temperature procedure for fabricating light-emitting silicon structures opens up the possibility of manufacturing integrated silicon-based optoelectronics.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-08-12
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/11378]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Wang YQ,Chen WD,Liao XB,et al. Amorphous silicon nanoparticles in compound films grown on cold substrates for high-efficiency photoluminescence[J]. nanotechnology,2003,14(11):1235-1238.
APA	Wang YQ,Chen WD,Liao XB,&Cao ZX.(2003).Amorphous silicon nanoparticles in compound films grown on cold substrates for high-efficiency photoluminescence.nanotechnology,14(11),1235-1238.
MLA	Wang YQ,et al."Amorphous silicon nanoparticles in compound films grown on cold substrates for high-efficiency photoluminescence".nanotechnology 14.11(2003):1235-1238.