Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors
	Li ZY (Li Zhiyong) ; Yu JZ (Yu Jinzhong) ; Chen SW (Chen Shaowu) ; Liu JW (Liu Jingwei)
刊名	journal of lightwave technology
	2006
卷号	24 期号:12 页码:5008-5012
关键词	corner reflection mirror
ISSN号	issn: 0733-8724
通讯作者	li, zy, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: lizhy@red.semi.ac.cn ; jzyu@red.semi.ac.cn ; swchen@red.semi.ac.cn ; jwliu@red.semi.ac.cn
中文摘要	novel folding 8 x 8 matrix switches based on silicon on insulator were demonstrated. in the design, single-mode rib waveguides and multimode interferences are connected by optimized tapered waveguides to reduce the mode coupling loss between the two types of waveguides. the self-aligned method was applied to the key integrated turning mirrors for perfect positions and low loss of them. a mixed etching process including inductively coupled plasma and chemical etching was employed to etch waveguides and mirrors, respectively. the compact size of the device is only 20 x 3.2 mm(2). the switch element with high switching speed and low power consumption is presented in the matrix. the average insertion loss of the matrix is about -21 db, and the excess loss of one mirror is measured of -1.4 db. the worst crosstalk is larger than 21 db. experimental results illuminate that some of the main characteristics of optical matrix switches are. developed in the modified design, which is in accord with theoretic analyses.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-03-29
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/9668]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Li ZY ,Yu JZ ,Chen SW ,et al. Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors[J]. journal of lightwave technology,2006,24(12):5008-5012.
APA	Li ZY ,Yu JZ ,Chen SW ,&Liu JW .(2006).Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors.journal of lightwave technology,24(12),5008-5012.
MLA	Li ZY ,et al."Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors".journal of lightwave technology 24.12(2006):5008-5012.