Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing

	Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing
	Hu, XK ; song, zt(重点实验室） ; Wang, HB ; Liu, WL ; Qin, F ; Zhang, ZF
刊名	POWDER TECHNOLOGY AND APPLICATION II
	2010
卷号	92 页码:183-187
关键词	Materials Science Materials Science Multidisciplinary Coatings & Films
ISSN号	1022-6680
学科主题	Materials Science
收录类别	SCI
原文出处	10.4028/www.scientific.net/AMR.92.183
语种	英语
公开日期	2013-05-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/115466]
专题	上海微系统与信息技术研究所_信息功能材料国家重点实验室2008-2012_期刊论文
推荐引用方式 GB/T 7714	Hu, XK,song, zt,Wang, HB,et al. Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing[J]. POWDER TECHNOLOGY AND APPLICATION II,2010,92:183-187.
APA	Hu, XK,song, zt,Wang, HB,Liu, WL,Qin, F,&Zhang, ZF.(2010).Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing.POWDER TECHNOLOGY AND APPLICATION II,92,183-187.
MLA	Hu, XK,et al."Preparation of Silica Abrasives from Water Glass and Application in Silicon Wafer Polishing".POWDER TECHNOLOGY AND APPLICATION II 92(2010):183-187.