Design of quantum cascade microcavity lasers based on Q factor versus etching depth

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Design of quantum cascade microcavity lasers based on Q factor versus etching depth
	Yang YD
刊名	journal of the optical society of america b-optical physics
	2009
卷号	26 期号:8 页码:1484-1491
关键词	WHISPERING-GALLERY MODES DIFFERENCE TIME-DOMAIN MU-M NUMERICAL-ANALYSIS SQUARE RESONATORS MICRODISK LASERS FDTD TECHNIQUE MICROLASERS
ISSN号	0740-3224
通讯作者	huang yz chinese acad sci state key lab integrated optoelect inst semicond beijing 100083 peoples r china. e-mail address: yzhuang@semi.ac.cn
中文摘要	the choice of the etching depth for semiconductor microcavities is a compromise between a high q factor and a difficult technique in a practical fabricating process. in this paper, the influences of the etching depth on mode q factors for mid-infrared quantum cascade microcylinder and microsquare lasers around 4.8 and 7.8 mu m are simulated by three-dimensional (3d) finite-difference time-domain (fdtd) techniques. for the microcylinder and the microsquare resonators, the mode q factors of the whispering-gallery modes (wgms) increase exponentially and linearly with the increase in the etching depth, respectively furthermore, the mode q factors of some higher order transverse wgms may be larger than that of the fundamental transverse wgm in 3d microsquares. based on the field distribution of the vertical multilayer slab waveguide and the mode q factors versus the etching depth, the necessary etching depth is chosen at the position where the field amplitude is 1% of the peak value of the slab waveguide. in addition, the influences of sidewall roughness on the mode q factors are simulated for microsquare resonators by 2d fdtd simulation. (c) 2009 optical society of america
学科主题	光电子学
收录类别	SCI
资助信息	national natural science foundation of china (nsfc) 60777028 6072300260838003major state basic research program 2006cb302804 this work was supported by the national natural science foundation of china (nsfc) grants 60777028 60723002 and 60838003 and the major state basic research program grant 2006cb302804.
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/7019]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yang YD. Design of quantum cascade microcavity lasers based on Q factor versus etching depth[J]. journal of the optical society of america b-optical physics,2009,26(8):1484-1491.
APA	Yang YD.(2009).Design of quantum cascade microcavity lasers based on Q factor versus etching depth.journal of the optical society of america b-optical physics,26(8),1484-1491.
MLA	Yang YD."Design of quantum cascade microcavity lasers based on Q factor versus etching depth".journal of the optical society of america b-optical physics 26.8(2009):1484-1491.